Necmi Biyikli Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Necmi Biyikli returned 40 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
2Preparation of Al2O3 and AlN Nanotubes by Atomic Layer Deposition
3The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
4Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition
5Atomic layer deposition of GaN at low temperatures
6Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
7Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes
8Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films
9Effect of Film Thickness on the Electrical Properties of AlN Films Prepared by Plasma-Enhanced Atomic Layer Deposition
10Self-Limiting Growth of GaN at Low Temperatures
11Low-Temperature Self-Limiting Growth of III-Nitride Thin Films by Plasma-Enhanced Atomic Layer Deposition
12Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
13Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
14Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
15Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition