Necmi Biyikli Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Necmi Biyikli returned 40 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of GaN at low temperatures
2The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
3Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films
4Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
5Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
6Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
7Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
8Self-Limiting Growth of GaN at Low Temperatures
9Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition
10Low-Temperature Self-Limiting Growth of III-Nitride Thin Films by Plasma-Enhanced Atomic Layer Deposition
11Effect of Film Thickness on the Electrical Properties of AlN Films Prepared by Plasma-Enhanced Atomic Layer Deposition
12Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes
13Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
14Preparation of Al2O3 and AlN Nanotubes by Atomic Layer Deposition
15Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma