Sub-7-nm textured ZrO2 with giant ferroelectricity

Type:
Journal
Info:
Acta Materialia 205 (2021) 116536
Date:
2020-11-29

Author Information

Name Institution
Kuei-Wen HuangNational Taiwan University
Sheng-Han YiNational Taiwan University
Yu-Sen JiangNational Taiwan University
Wei-Chung KaoNational Taiwan University
Yu-Tung YinNational Taiwan University
David BeckAsylum Research, an Oxford Instruments Company
Vladimir KorolkovAsylum Research, an Oxford Instruments Company
Roger ProkschAsylum Research, an Oxford Instruments Company
Jay ShiehNational Taiwan University
Miin-Jang ChenNational Taiwan University

Films


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Ferroelectricity
Analysis: P-V, Polarization-Voltage Measurements

Characteristic: Dielectric Constant, Permittivity
Analysis: C-V, Capacitance-Voltage Measurements

Characteristic: Piezoelectric properties
Analysis: PFM Piezo Force Microscopy

Substrates

Pt

Keywords

Ferroelectrics

Notes

1586