Kuei-Wen Huang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kuei-Wen Huang returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Effective work function modulation of the bilayer metal gate stacks by the Hf-doped thin TiN interlayer prepared by the in-situ atomic layer doping technique
2Sub-7-nm textured ZrO2 with giant ferroelectricity
3Sub-nanometer heating depth of atomic layer annealing