TDMAZr, (Me2N)4Zr, [(CH3)2N]4Zr, Tetrakis(DiMethylAmido) Zirconium, Zirconium Dimethylamide, CAS# 19756-04-8

Where to buy

NumberVendorRegionLink
1EreztechπŸ‡ΊπŸ‡ΈTetrakis(dimethylamino) zirconium
2Pegasus ChemicalsπŸ‡¬πŸ‡§Tetrakis(dimethylamido)zirconium(IV)
3Strem Chemicals, Inc.πŸ‡ΊπŸ‡ΈTetrakis(dimethylamino)zirconium, 99% TDMAZ
4Strem Chemicals, Inc.πŸ‡ΊπŸ‡ΈTetrakis(dimethylamino)zirconium, 99% (99.99%-Zr) TDMAZ
5Strem Chemicals, Inc.πŸ‡ΊπŸ‡ΈTetrakis(dimethylamino)zirconium(IV), 99% (99.99%-Zr) TDMAZ, 40-4115, contained in 50ml cylinder (96-1070) for CVD/ALD
6Strem Chemicals, Inc.πŸ‡ΊπŸ‡ΈTetrakis(dimethylamino)zirconium(IV), 99% TDMAZ, contained in 50 ml cylinder for CVD/ALD
7DOCK/CHEMICALSπŸ‡©πŸ‡ͺTetrakis(dimethylamido)zirconium
8GelestπŸ‡ΊπŸ‡ΈZirconium Tetrakis(Dimethylamide)

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 37 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1In situ atomic layer nitridation on the top and down regions of the amorphous and crystalline high-K gate dielectrics
2Sub-7-nm textured ZrO2 with giant ferroelectricity
3Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells
4Stability of plasma-enhanced atomic layer deposited barrier films in biological solutions
5Single-Cell Photonic Nanocavity Probes
6Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells
7In situ atomic layer nitridation on the top and down regions of the amorphous and crystalline high-K gate dielectrics
8Suppression of GeOx interfacial layer and enhancement of the electrical performance of the high-K gate stack by the atomic-layer-deposited AlN buffer layer on Ge metal-oxide-semiconductor devices
9Surface engineering of nanoporous substrate for solid oxide fuel cells with atomic layer-deposited electrolyte
10Optimization of Y2O3 dopant concentration of yttria stabilized zirconia thin film electrolyte prepared by plasma enhanced atomic layer deposition for high performance thin film solid oxide fuel cells
11ZrO2 on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition
12Probing initial-stages of ALD growth with dynamic in situ spectroscopic ellipsometry
13Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
14Achieving ultrahigh corrosion resistance and conductive zirconium oxynitride coating on metal bipolar plates by plasma enhanced atomic layer deposition
15Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
16AxBAxB... pulsed atomic layer deposition: Numerical growth model and experiments
17Low temperature plasma enhanced atomic layer deposition of conducting zirconium nitride films using tetrakis (dimethylamido) zirconium and forming gas (5% H2 + 95% N2) plasma
18Suppression of interfacial layer in high-K gate stack with crystalline high-K dielectric and AlN buffer layer structure
19Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
20Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al2O3 Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO2/InxGa1-xAs (M = Hf|Zr, x = 0|0.53) Gate Stacks
21Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy
22Achieving ultrahigh corrosion resistance and conductive zirconium oxynitride coating on metal bipolar plates by plasma enhanced atomic layer deposition
23Atomic layer deposition of ultrathin blocking layer for low-temperature solid oxide fuel cell on nanoporous substrate
24Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
25Effect of anode morphology on the performance of thin film solid oxide fuel cell with PEALD YSZ electrolyte
26The Cut-Off Phenomenon Effect on ZrO2 Growth Using Remote Plasma-Enhanced Atomic Layer Deposition
27Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells
28Lithium-Iron (III) Fluoride Battery with Double Surface Protection
29Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films
30Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-k gate dielectrics
31Influence of atomic layer deposition valve temperature on ZrN plasma enhanced atomic layer deposition growth
32Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
33Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing
34Low-Leakage Tetragonal ZrO2 (EOT < 1 nm) With In Situ Plasma Interfacial Passivation on Germanium
35Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials
36Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
37Plasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate