Name

Institution

Taehyun Park

Seoul National University

Gu Young Cho

Seoul National University

Yoon Ho Lee

Seoul National University

Waqas Hassan Tanveer

Seoul National University

Wonjong Yu

Seoul National University

Yeageun Lee

Seoul National University

Yusung Kim

Seoul National University

Jihwan An

Seoul National University of Science and Technology

Suk Won Cha

Seoul National University

Plasma YSZ using Atomic Premium CN1

Deposition Temperature = 250C

TDMAZ, Tetrakis[(DiMethyl)Amido] Zirconium, [Me₂N]₄Zr

19756-04-8

Where to buy precursor

Tris(methylcyclopentadienyl)yttrium(III), (MeCp)₃Y

329735-72-0

Where to buy precursor

Oxygen, O₂

7782-44-7

Characteristic

Analysis

Diagnostic

Images

SEM, Scanning Electron Microscopy

Hitachi S-4800 Field Emission Scanning Electron Microscope

Images

SEM, Scanning Electron Microscopy

FEI Quanta 3D FEG

Conformality, Step Coverage

TEM, Transmission Electron Microscope

JEOL 2100F

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

JEOL 2100F

Pt

Fuel Cell

821