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Effect of anode morphology on the performance of thin film solid oxide fuel cell with PEALD YSZ electrolyte

Type:
Journal
Info:
International Journal of Hydrogen Energy 41 (2016) 9638 - 9643
Date:
2016-04-13
DOI:
http://dx.doi.org/10.1016/j.ijhydene.2016.04.092

Author Information

Name Institution
Taehyun ParkSeoul National University
Gu Young ChoSeoul National University
Yoon Ho LeeSeoul National University
Waqas Hassan TanveerSeoul National University
Wonjong YuSeoul National University
Yeageun LeeSeoul National University
Yusung KimSeoul National University
Jihwan AnSeoul National University of Science and Technology
Suk Won ChaSeoul National University

Films

Plasma YSZ

Hardware used: CN1 Atomic Premium
TDMAZr, (Me2N)4Zr, [(CH3)2N]4Zr, Tetrakis(DiMethylAmido) Zirconium, Zirconium Dimethylamide
CAS#: 19756-04-8
Tris(methylcyclopentadienyl)yttrium(III), (MeCp)3Y
CAS#: 329735-72-0
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 250C

Film/Plasma Properties

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Hitachi S-4800 Field Emission Scanning Electron Microscope

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Quanta 3D FEG

Characteristic: Conformality, Step Coverage
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL 2100F

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: JEOL 2100F

Substrates

Pt

Notes

821