Effect of anode morphology on the performance of thin film solid oxide fuel cell with PEALD YSZ electrolyte

Publication Information

Title: Effect of anode morphology on the performance of thin film solid oxide fuel cell with PEALD YSZ electrolyte

Type: Journal

Info: International Journal of Hydrogen Energy 41 (2016) 9638 - 9643

Date: 2016-04-13

DOI: http://dx.doi.org/10.1016/j.ijhydene.2016.04.092

Author Information

Name

Institution

Taehyun Park

Seoul National University

Gu Young Cho

Seoul National University

Yoon Ho Lee

Seoul National University

Waqas Hassan Tanveer

Seoul National University

Wonjong Yu

Seoul National University

Yeageun Lee

Seoul National University

Yusung Kim

Seoul National University

Jihwan An

Seoul National University of Science and Technology

Suk Won Cha

Seoul National University

Films

Plasma YSZ using Atomic Premium CN1

Deposition Temperature = 250C

TDMAZr, (Me₂N)₄Zr, [(CH₃)₂N]₄Zr, Tetrakis(DiMethylAmido) Zirconium, Zirconium Dimethylamide

19756-04-8

Where to buy precursor

Tris(methylcyclopentadienyl)yttrium(III), (MeCp)₃Y

329735-72-0

Where to buy precursor

O₂, Oxygen

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Images

SEM, Scanning Electron Microscopy

Hitachi S-4800 Field Emission Scanning Electron Microscope

Images

SEM, Scanning Electron Microscopy

FEI Quanta 3D FEG

Conformality, Step Coverage

TEM, Transmission Electron Microscope

JEOL 2100F

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

JEOL 2100F

Substrates

Keywords

Fuel Cell

Notes

821

Mark Sowa

Shortcuts

Films

Precursors

Deposition Hardware

Film and Plasma Characteristics

Multi-factor Search

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On-line PEALD Theses

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