Yusung Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yusung Kim returned 2 record(s).

Number	Title
1	Effect of anode morphology on the performance of thin film solid oxide fuel cell with PEALD YSZ electrolyte
2	Effects of carbon contaminations on Y₂O₃-stabilized ZrO₂ thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells