Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

TDMAZr, (Me2N)4Zr, [(CH3)2N]4Zr, Tetrakis(DiMethylAmido) Zirconium, Zirconium Dimethylamide, CAS# 19756-04-8

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 39 record(s).

NumberTitle
1Low-Leakage Tetragonal ZrO2 (EOT < 1 nm) With In Situ Plasma Interfacial Passivation on Germanium
2Achieving ultrahigh corrosion resistance and conductive zirconium oxynitride coating on metal bipolar plates by plasma enhanced atomic layer deposition
3Plasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate
4Stability of plasma-enhanced atomic layer deposited barrier films in biological solutions
5AxBAxB... pulsed atomic layer deposition: Numerical growth model and experiments
6The Cut-Off Phenomenon Effect on ZrO2 Growth Using Remote Plasma-Enhanced Atomic Layer Deposition
7Suppression of GeOx interfacial layer and enhancement of the electrical performance of the high-K gate stack by the atomic-layer-deposited AlN buffer layer on Ge metal-oxide-semiconductor devices
8Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al2O3 Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO2/InxGa1-xAs (M = Hf|Zr, x = 0|0.53) Gate Stacks
9Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
10Surface engineering of nanoporous substrate for solid oxide fuel cells with atomic layer-deposited electrolyte
11Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy
12Effect of anode morphology on the performance of thin film solid oxide fuel cell with PEALD YSZ electrolyte
13Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells
14Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials
15Achieving ultrahigh corrosion resistance and conductive zirconium oxynitride coating on metal bipolar plates by plasma enhanced atomic layer deposition
16ZrO2 on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition
17Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
18Nonvolatile Capacitive Crossbar Array for In-Memory Computing
19In situ atomic layer nitridation on the top and down regions of the amorphous and crystalline high-K gate dielectrics
20Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-k gate dielectrics
21Suppression of interfacial layer in high-K gate stack with crystalline high-K dielectric and AlN buffer layer structure
22Optimization of Y2O3 dopant concentration of yttria stabilized zirconia thin film electrolyte prepared by plasma enhanced atomic layer deposition for high performance thin film solid oxide fuel cells
23Low temperature plasma enhanced atomic layer deposition of conducting zirconium nitride films using tetrakis (dimethylamido) zirconium and forming gas (5% H2 + 95% N2) plasma
24Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells
25Lithium-Iron (III) Fluoride Battery with Double Surface Protection
26Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
27Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
28Single-Cell Photonic Nanocavity Probes
29Sub-7-nm textured ZrO2 with giant ferroelectricity
30Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
31Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
32Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films
33Nanocrystallite Seeding of Metastable Ferroelectric Phase Formation in Atomic Layer-Deposited Hafnia-Zirconia Alloys
34Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells
35Influence of atomic layer deposition valve temperature on ZrN plasma enhanced atomic layer deposition growth
36In situ atomic layer nitridation on the top and down regions of the amorphous and crystalline high-K gate dielectrics
37Atomic layer deposition of ultrathin blocking layer for low-temperature solid oxide fuel cell on nanoporous substrate
38Probing initial-stages of ALD growth with dynamic in situ spectroscopic ellipsometry
39Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing