Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy
Type:
Journal
Info:
Surface & Coatings Technology 427 (2021) 127811
Date:
2021-10-09
Author Information
| Name | Institution |
|---|---|
| P. C. Lin | National Taiwan University |
| K. F. Lin | National Taiwan University |
| C. Chiu | National Taiwan University |
| V. I. Semenov | Ufa State Aviation Technical University |
| Hsin-Chih Lin | National Taiwan University |
| Miin-Jang Chen | National Taiwan University |
Films
Thermal ZrO2
Other ZrO2
Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
CAS#: 19756-04-8
CAS#: 7732-18-5
CAS#: 7782-44-7
Film/Plasma Properties
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Electrochemical Performance
Analysis: EIS, Electrochemical Impedance Spectroscopy
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Corrosion
Analysis: EPMA, Electron Probe Micro Analyzer
Substrates
| Mg-Ca |
Notes
| 1628 |