Inductively coupled plasma sources from Plasma ALD, LLC.


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Waqas Hassan Tanveer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Waqas Hassan Tanveer returned 3 record(s).

NumberTitle
1Surface engineering of nanoporous substrate for solid oxide fuel cells with atomic layer-deposited electrolyte
2Effect of anode morphology on the performance of thin film solid oxide fuel cell with PEALD YSZ electrolyte
3Atomic layer deposition of ultrathin blocking layer for low-temperature solid oxide fuel cell on nanoporous substrate