Publication Information

Title:
Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-k gate dielectrics
Type:
Journal
Info:
RSC Adv., 2016, 6, 16301-16307
Date:
2016-01-20

Author Information

Name Institution
Kaveh AhadiUniversity of Alberta
Ken CadienUniversity of Alberta

Films





Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Capacitance
Analysis: C-V, Capacitance-Voltage Measurements

Characteristic: Interface Trap Density
Analysis: C-V, Capacitance-Voltage Measurements

Characteristic: Leakage Current
Analysis: I-V, Current-Voltage Measurements

Substrates

Keywords

Notes

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