Kurt J Lesker ALD-150L Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Kurt J Lesker ALD-150L hardware returned 13 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Achieving ultrahigh corrosion resistance and conductive zirconium oxynitride coating on metal bipolar plates by plasma enhanced atomic layer deposition
2AxBAxB... pulsed atomic layer deposition: Numerical growth model and experiments
3Engineered Tunneling Contacts with Low-Temperature Atomic Layer Deposition of AlN on GaN
4Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition
5Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
6Performance enhancement of InAsSb QW-MOSFETs with in-situ H2 plasma cleaning for gate stack formation
7Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN
8Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
9Structural and optical characterization of low-temperature ALD crystalline AlN
10Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-k gate dielectrics
11Uniform Growth of Sub-5-Nanometer High-κ Dielectrics on MoS2 Using Plasma-Enhanced Atomic Layer Deposition
12XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition
13ZrO2 on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition


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