Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN
Type:
Journal
Info:
2014 J. Phys. D: Appl. Phys. 47 345104
Date:
2014-06-24
Author Information
| Name | Institution |
|---|---|
| Kevin Voon | University of Alberta |
| Kyle Bothe | University of Alberta |
| Pouyan Motamedi | University of Alberta |
| Kenneth C. Cadien | University of Alberta |
| Douglas W. Barlage | University of Alberta |
Films
Plasma AlN
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Substrates
Notes
| 561 |