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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
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Kevin Voon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kevin Voon returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Engineered Tunneling Contacts with Low-Temperature Atomic Layer Deposition of AlN on GaN
2Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
3Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN