Kevin Voon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kevin Voon returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
2Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN
3Engineered Tunneling Contacts with Low-Temperature Atomic Layer Deposition of AlN on GaN