Publication Information

Title:
Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
Type:
Conference Proceedings
Info:
2014 GaAs ManTech Conference
Date:
2014-05-19

Author Information

Name Institution
Kyle BotheUniversity of Alberta
A. MaUniversity of Alberta
Kevin VoonUniversity of Alberta
Amir AfsharUniversity of Alberta
Pouyan MotamediUniversity of Alberta
Kenneth C. CadienUniversity of Alberta
Douglas W. BarlageUniversity of Alberta

Films

Plasma AlN



Film/Plasma Properties

Characteristic: Resistivity, Sheet Resistance
Analysis: -

Characteristic: Unknown
Analysis: C-V, Capacitance-Voltage Measurements

Substrates

GaN
AlN

Keywords

Notes

563