Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
Type:
Conference Proceedings
Info:
2014 GaAs ManTech Conference
Date:
2014-05-19
Author Information
| Name | Institution |
|---|---|
| Kyle Bothe | University of Alberta |
| A. Ma | University of Alberta |
| Kevin Voon | University of Alberta |
| Amir Afshar | University of Alberta |
| Pouyan Motamedi | University of Alberta |
| Kenneth C. Cadien | University of Alberta |
| Douglas W. Barlage | University of Alberta |
Films
Plasma AlN
Plasma ZrO2
Film/Plasma Properties
Characteristic: Resistivity, Sheet Resistance
Analysis: -
Characteristic: Unknown
Analysis: C-V, Capacitance-Voltage Measurements
Substrates
| GaN |
| AlN |
Notes
| 563 |