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Kenneth C. Cadien Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kenneth C. Cadien returned 26 record(s).

NumberTitle
1AlN PEALD with TMA and forming gas: study of plasma reaction mechanisms
2Structural and optical characterization of low-temperature ALD crystalline AlN
3High Mobility (210cm2/Vs), High Capacitance (7.2uF/cm2) ZrO2 on GaN Metal Oxide Semiconductor Capacitor via ALD
4Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition
5Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-k gate dielectrics
6A route to low temperature growth of single crystal GaN on sapphire
7In Situ Synchrotron X-Ray Diffraction Analysis of Phase Transformation in Epitaxial Metastable hcp Nickel Thin Films, Prepared via Plasma-Enhanced Atomic Layer Deposition
8Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
9Low temperature plasma enhanced atomic layer deposition of conducting zirconium nitride films using tetrakis (dimethylamido) zirconium and forming gas (5% H2 + 95% N2) plasma
10Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN
11ZrO2 on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition
12Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
13Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
14Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices
15Performance of Nanocrystal ZnO Thin-Film Schottky Contacts on Cu by Atomic Layer Deposition
16Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition
17XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition
18Achieving ultrahigh corrosion resistance and conductive zirconium oxynitride coating on metal bipolar plates by plasma enhanced atomic layer deposition
19Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition
20AxBAxB... pulsed atomic layer deposition: Numerical growth model and experiments
21Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
22Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization
23Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
24Probing initial-stages of ALD growth with dynamic in situ spectroscopic ellipsometry
25Engineered Tunneling Contacts with Low-Temperature Atomic Layer Deposition of AlN on GaN
26Influence of atomic layer deposition valve temperature on ZrN plasma enhanced atomic layer deposition growth