Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
Type:
Journal
Info:
Nature Communications, v. 7 (2016)
Date:
2016-01-06
Author Information
Name | Institution |
---|---|
Gem Shoute | University of Alberta |
Amir Afshar | University of Alberta |
Triratna Muneshwar | University of Alberta |
Kenneth C. Cadien | University of Alberta |
Douglas W. Barlage | University of Alberta |
Films
Thermal ZnO
Plasma HfO2
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Transistor Characteristics
Analysis: Transistor Characterization
Substrates
Silicon |
ZnO |
Keywords
Notes
764 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |