Triratna Muneshwar Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Triratna Muneshwar returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Probing initial-stages of ALD growth with dynamic in situ spectroscopic ellipsometry
2AxBAxB... pulsed atomic layer deposition: Numerical growth model and experiments
3Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
4Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
5Low temperature plasma enhanced atomic layer deposition of conducting zirconium nitride films using tetrakis (dimethylamido) zirconium and forming gas (5% H2 + 95% N2) plasma
6Achieving ultrahigh corrosion resistance and conductive zirconium oxynitride coating on metal bipolar plates by plasma enhanced atomic layer deposition
7Influence of atomic layer deposition valve temperature on ZrN plasma enhanced atomic layer deposition growth
8Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization
9Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices