Title: Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices
Type: Conference Proceedings
Info: 2016 IEEE International Conference on Plasma Science (ICOPS)
Date: 2016-06-13
DOI: http://dx.doi.org/10.1109/PLASMA.2016.7534230
Name
Institution
University of Alberta
University of Alberta
University of Alberta
University of Alberta
University of Alberta
University of Alberta
Characteristic
Analysis
Diagnostic
960
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