Last Month's Statistics
Most Viewed Publications
Most Searched Films
Most Searched Precursors
Most Searched Hardware
The publication database currently has 1567 entries.
Search from:
195 Films Compositions
265 Precursors and Plasma Gases
76 Deposition Hardwares
242 Film and Plasma Characteristics
84 Theses
Use Multifactor Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)
ALD Links
Contact Us
Advertising
Search 1567 plasma ALD publications by:
Search 1567 plasma ALD publications by:
Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices
Type:
Conference Proceedings
Info:
2016 IEEE International Conference on Plasma Science (ICOPS)
Date:
2016-06-13
Author Information
| Name | Institution |
|---|---|
| Mei Shen | University of Alberta |
| Triratna Muneshwar | University of Alberta |
| Kenneth C. Cadien | University of Alberta |
| Ying Yin Tsui | University of Alberta |
| Douglas W. Barlage | University of Alberta |
| Triratna Muneshwar | University of Alberta |
Films
Plasma ZnO
Film/Plasma Properties
Substrates
Keywords
Notes
| 960 |