Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices
Type:
Conference Proceedings
Info:
2016 IEEE International Conference on Plasma Science (ICOPS)
Date:
2016-06-13
Author Information
Name | Institution |
---|---|
Mei Shen | University of Alberta |
Triratna Muneshwar | University of Alberta |
Kenneth C. Cadien | University of Alberta |
Ying Yin Tsui | University of Alberta |
Douglas W. Barlage | University of Alberta |
Triratna Muneshwar | University of Alberta |
Films
Plasma ZnO
Film/Plasma Properties
Substrates
Keywords
Notes
960 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |