Publication Information

Title: Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices

Type: Conference Proceedings

Info: 2016 IEEE International Conference on Plasma Science (ICOPS)

Date: 2016-06-13

DOI: http://dx.doi.org/10.1109/PLASMA.2016.7534230

Author Information

Name

Institution

University of Alberta

University of Alberta

University of Alberta

University of Alberta

University of Alberta

University of Alberta

Films

Deposition Temperature Range N/A

557-20-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

960



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