ZnO Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing ZnO films returned 73 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Enhanced electron field emission properties of high aspect ratio silicon nanowire-zinc oxide core-shell arrays
2Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
3Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
4Oxide TFT LC Oscillators on Glass and Plastic for Wireless Functions in Large-Area Flexible Electronic Systems
5Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
6All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process
7Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma
8From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
9The Effects of an O2 Plasma on the Optical Properties of Atomic Layer Deposited ZnO
10Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
11Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
12Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell
13Inhibiting Metal Oxide Atomic Layer Deposition: Beyond Zinc Oxide
14ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window"
15Effect of Process Parameters on Remote PEALD for Highly Transparent ZnO Film Growth
16Bipolar resistive switching characteristics of low temperature grown ZnO thin films by plasma-enhanced atomic layer deposition
17The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
18Disrupted Attosecond Charge Carrier Delocalization at a Hybrid Organic/Inorganic Semiconductor Interface
19New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping
20Radical Enhanced Atomic Layer Deposition of Metals and Oxides
21Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD
22Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
23Plasma-Modified Atomic Layer Deposition
24Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices
25The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor
26Influence of Precursor Density and Conversion Time on the Orientation of Vapor-Deposited ZIF-8
27Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
28Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
29Hysteresis behaviour of top-down fabricated ZnO nanowire transistors
30Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
31Fabrication of Si3N4-Based Artificial Basilar Membrane with ZnO Nanopillar Using MEMS Process
32Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition
33Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
34Low-Power Double-Gate ZnO TFT Active Rectifier
35Self-aligned ZnO thin-film transistors with 860 MHz fT and 2 GHz fmax for large-area applications
36Fabrication and Characterization of Flexible Thin Film Transistors on Thin Solution-Cast Substrates
37Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices
38Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
39Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
40Effect of hydrogen peroxide pretreatment on ZnO-based metal-semiconductor-metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition
41Growth of controllable ZnO film by atomic layer deposition technique via inductively coupled plasma treatment
42Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
43Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
44Fast Flexible Plastic Substrate ZnO Circuits
45P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping
46Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO
47Forming-free resistive switching of tunable ZnO films grown by atomic layer deposition
48Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate
49Characteristics of ZnO Thin Films by Means of Plasma-Enhanced Atomic Layer Deposition
50Flexible Technologies for Self-Powered Wearable Health and Environmental Sensing
51Electrical Characterization of Metal-Insulator-Semiconductor Capacitors Having Double-Layered Atomic-Layer-Deposited Al2O3 and ZnO for Transparent Thin Film Transistor Applications
52The "Pure Marriage" between 3D Printing and Well-Ordered Nanoarrays by Using PEALD Assisted Hydrothermal Surface Engineering
53Performance of Nanocrystal ZnO Thin-Film Schottky Contacts on Cu by Atomic Layer Deposition
54Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
55Effect of in situ hydrogen plasma treatment on zinc oxide grown using low temperature atomic layer deposition
56A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density
57ZnO Thin Films Fabricated by Plasma-Assisted Atomic Layer Deposition
58Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
59Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
60Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
61Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications
62Spectroscopy and control of near-surface defects in conductive thin film ZnO
63Metal-oxide-based hole-selective tunneling contacts for crystalline silicon solar cells
64Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
65Top-down fabricated ZnO nanowire transistors for application in biosensors
66Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms
67Synaptic Plasticity and Learning Behaviors Mimicked in Single Inorganic Synapses of Pt/HfOx/ZnOx/TiN Memristive System
68The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
69Oxide semiconductor thin film transistors on thin solution-cast flexible substrates
70Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
71Efficient Modification of Metal Oxide Surfaces with Phosphonic Acids by Spray Coating
72Fast PEALD ZnO Thin-Film Transistor Circuits
73Tailoring Electron-Transfer Barriers for Zinc Oxide/C60 Fullerene Interfaces