ZnO Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing ZnO films returned 72 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping
2A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density
3Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate
4Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms
5Fabrication of Si3N4-Based Artificial Basilar Membrane with ZnO Nanopillar Using MEMS Process
6Flexible Technologies for Self-Powered Wearable Health and Environmental Sensing
7Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
8Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
9Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
10Fabrication and Characterization of Flexible Thin Film Transistors on Thin Solution-Cast Substrates
11Spectroscopy and control of near-surface defects in conductive thin film ZnO
12Oxide semiconductor thin film transistors on thin solution-cast flexible substrates
13The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
14ZnO Thin Films Fabricated by Plasma-Assisted Atomic Layer Deposition
15The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor
16Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
17The Effects of an O2 Plasma on the Optical Properties of Atomic Layer Deposited ZnO
18Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
19Efficient Modification of Metal Oxide Surfaces with Phosphonic Acids by Spray Coating
20Plasma-Modified Atomic Layer Deposition
21Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
22The "Pure Marriage" between 3D Printing and Well-Ordered Nanoarrays by Using PEALD Assisted Hydrothermal Surface Engineering
23Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
24Oxide TFT LC Oscillators on Glass and Plastic for Wireless Functions in Large-Area Flexible Electronic Systems
25Characteristics of ZnO Thin Films by Means of Plasma-Enhanced Atomic Layer Deposition
26Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices
27Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
28Effect of in situ hydrogen plasma treatment on zinc oxide grown using low temperature atomic layer deposition
29Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
30Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
31Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma
32Radical Enhanced Atomic Layer Deposition of Metals and Oxides
33Enhanced electron field emission properties of high aspect ratio silicon nanowire-zinc oxide core-shell arrays
34The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
35Top-down fabricated ZnO nanowire transistors for application in biosensors
36Fast Flexible Plastic Substrate ZnO Circuits
37Effect of hydrogen peroxide pretreatment on ZnO-based metal-semiconductor-metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition
38Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
39Hysteresis behaviour of top-down fabricated ZnO nanowire transistors
40Forming-free resistive switching of tunable ZnO films grown by atomic layer deposition
41Growth of controllable ZnO film by atomic layer deposition technique via inductively coupled plasma treatment
42Bipolar resistive switching characteristics of low temperature grown ZnO thin films by plasma-enhanced atomic layer deposition
43Metal-oxide-based hole-selective tunneling contacts for crystalline silicon solar cells
44Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
45Performance of Nanocrystal ZnO Thin-Film Schottky Contacts on Cu by Atomic Layer Deposition
46Disrupted Attosecond Charge Carrier Delocalization at a Hybrid Organic/Inorganic Semiconductor Interface
47Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO
48Effect of Process Parameters on Remote PEALD for Highly Transparent ZnO Film Growth
49Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices
50Electrical Characterization of Metal-Insulator-Semiconductor Capacitors Having Double-Layered Atomic-Layer-Deposited Al2O3 and ZnO for Transparent Thin Film Transistor Applications
51Self-aligned ZnO thin-film transistors with 860 MHz fT and 2 GHz fmax for large-area applications
52Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
53Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition
54P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping
55Synaptic Plasticity and Learning Behaviors Mimicked in Single Inorganic Synapses of Pt/HfOx/ZnOx/TiN Memristive System
56Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications
57From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
58Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD
59Low-Power Double-Gate ZnO TFT Active Rectifier
60Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
61Inhibiting Metal Oxide Atomic Layer Deposition: Beyond Zinc Oxide
62Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
63Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
64Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
65All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process
66Tailoring Electron-Transfer Barriers for Zinc Oxide/C60 Fullerene Interfaces
67Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
68ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window"
69Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
70Fast PEALD ZnO Thin-Film Transistor Circuits
71Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
72Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell