ZnO Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing ZnO films returned 72 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process
2Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
3Disrupted Attosecond Charge Carrier Delocalization at a Hybrid Organic/Inorganic Semiconductor Interface
4Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD
5Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
6Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell
7Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
8Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
9Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
10Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO
11The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
12Radical Enhanced Atomic Layer Deposition of Metals and Oxides
13Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
14Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices
15Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
16ZnO Thin Films Fabricated by Plasma-Assisted Atomic Layer Deposition
17Oxide TFT LC Oscillators on Glass and Plastic for Wireless Functions in Large-Area Flexible Electronic Systems
18A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density
19Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
20Hysteresis behaviour of top-down fabricated ZnO nanowire transistors
21Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate
22Characteristics of ZnO Thin Films by Means of Plasma-Enhanced Atomic Layer Deposition
23The Effects of an O2 Plasma on the Optical Properties of Atomic Layer Deposited ZnO
24Efficient Modification of Metal Oxide Surfaces with Phosphonic Acids by Spray Coating
25Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
26Synaptic Plasticity and Learning Behaviors Mimicked in Single Inorganic Synapses of Pt/HfOx/ZnOx/TiN Memristive System
27Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
28The "Pure Marriage" between 3D Printing and Well-Ordered Nanoarrays by Using PEALD Assisted Hydrothermal Surface Engineering
29Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
30From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
31Growth of controllable ZnO film by atomic layer deposition technique via inductively coupled plasma treatment
32Forming-free resistive switching of tunable ZnO films grown by atomic layer deposition
33Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma
34Spectroscopy and control of near-surface defects in conductive thin film ZnO
35Fast PEALD ZnO Thin-Film Transistor Circuits
36Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition
37Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
38Plasma-Modified Atomic Layer Deposition
39Effect of Process Parameters on Remote PEALD for Highly Transparent ZnO Film Growth
40Low-Power Double-Gate ZnO TFT Active Rectifier
41Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms
42Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
43Flexible Technologies for Self-Powered Wearable Health and Environmental Sensing
44Fabrication and Characterization of Flexible Thin Film Transistors on Thin Solution-Cast Substrates
45Tailoring Electron-Transfer Barriers for Zinc Oxide/C60 Fullerene Interfaces
46The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor
47Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications
48Effect of in situ hydrogen plasma treatment on zinc oxide grown using low temperature atomic layer deposition
49Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
50Fabrication of Si3N4-Based Artificial Basilar Membrane with ZnO Nanopillar Using MEMS Process
51Top-down fabricated ZnO nanowire transistors for application in biosensors
52New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping
53Effect of hydrogen peroxide pretreatment on ZnO-based metal-semiconductor-metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition
54Bipolar resistive switching characteristics of low temperature grown ZnO thin films by plasma-enhanced atomic layer deposition
55Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
56Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
57P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping
58Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
59Metal-oxide-based hole-selective tunneling contacts for crystalline silicon solar cells
60Self-aligned ZnO thin-film transistors with 860 MHz fT and 2 GHz fmax for large-area applications
61Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
62The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
63Electrical Characterization of Metal-Insulator-Semiconductor Capacitors Having Double-Layered Atomic-Layer-Deposited Al2O3 and ZnO for Transparent Thin Film Transistor Applications
64Oxide semiconductor thin film transistors on thin solution-cast flexible substrates
65Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
66Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices
67Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
68ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window"
69Performance of Nanocrystal ZnO Thin-Film Schottky Contacts on Cu by Atomic Layer Deposition
70Fast Flexible Plastic Substrate ZnO Circuits
71Enhanced electron field emission properties of high aspect ratio silicon nanowire-zinc oxide core-shell arrays
72Inhibiting Metal Oxide Atomic Layer Deposition: Beyond Zinc Oxide