Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

Contact us for more information.


ZnO Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing ZnO films returned 73 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Influence of Precursor Density and Conversion Time on the Orientation of Vapor-Deposited ZIF-8
2Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
3The "Pure Marriage" between 3D Printing and Well-Ordered Nanoarrays by Using PEALD Assisted Hydrothermal Surface Engineering
4Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices
5ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window"
6Fast Flexible Plastic Substrate ZnO Circuits
7Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
8Oxide semiconductor thin film transistors on thin solution-cast flexible substrates
9Efficient Modification of Metal Oxide Surfaces with Phosphonic Acids by Spray Coating
10Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
11Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-ALD
12A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density
13Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
14Electrical Characterization of Metal-Insulator-Semiconductor Capacitors Having Double-Layered Atomic-Layer-Deposited Al2O3 and ZnO for Transparent Thin Film Transistor Applications
15Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
16From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
17Effect of Process Parameters on Remote PEALD for Highly Transparent ZnO Film Growth
18Radical Enhanced Atomic Layer Deposition of Metals and Oxides
19Fabrication of Si3N4-Based Artificial Basilar Membrane with ZnO Nanopillar Using MEMS Process
20Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
21Top-down fabricated ZnO nanowire transistors for application in biosensors
22P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping
23Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
24Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO
25Flexible Technologies for Self-Powered Wearable Health and Environmental Sensing
26The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor
27Low-Power Double-Gate ZnO TFT Active Rectifier
28Enhanced electron field emission properties of high aspect ratio silicon nanowire-zinc oxide core-shell arrays
29Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD
30Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
31Tailoring Electron-Transfer Barriers for Zinc Oxide/C60 Fullerene Interfaces
32All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process
33Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
34Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
35Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
36Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices
37Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
38Performance of Nanocrystal ZnO Thin-Film Schottky Contacts on Cu by Atomic Layer Deposition
39Plasma-Modified Atomic Layer Deposition
40Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
41Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions
42Fabrication and Characterization of Flexible Thin Film Transistors on Thin Solution-Cast Substrates
43Spectroscopy and control of near-surface defects in conductive thin film ZnO
44Disrupted Attosecond Charge Carrier Delocalization at a Hybrid Organic/Inorganic Semiconductor Interface
45Growth of controllable ZnO film by atomic layer deposition technique via inductively coupled plasma treatment
46Hysteresis behaviour of top-down fabricated ZnO nanowire transistors
47Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma
48Characteristics of ZnO Thin Films by Means of Plasma-Enhanced Atomic Layer Deposition
49Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition
50Fast PEALD ZnO Thin-Film Transistor Circuits
51Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
52ZnO Thin Films Fabricated by Plasma-Assisted Atomic Layer Deposition
53The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
54Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
55New approach toward transparent and conductive ZnO by atomic layer deposition: Hydrogen plasma doping
56Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell
57Effect of hydrogen peroxide pretreatment on ZnO-based metal-semiconductor-metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition
58Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
59Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
60Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate
61Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications
62Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
63Metal-oxide-based hole-selective tunneling contacts for crystalline silicon solar cells
64Synaptic Plasticity and Learning Behaviors Mimicked in Single Inorganic Synapses of Pt/HfOx/ZnOx/TiN Memristive System
65Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms
66Oxide TFT LC Oscillators on Glass and Plastic for Wireless Functions in Large-Area Flexible Electronic Systems
67Forming-free resistive switching of tunable ZnO films grown by atomic layer deposition
68The Effects of an O2 Plasma on the Optical Properties of Atomic Layer Deposited ZnO
69Self-aligned ZnO thin-film transistors with 860 MHz fT and 2 GHz fmax for large-area applications
70The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
71Bipolar resistive switching characteristics of low temperature grown ZnO thin films by plasma-enhanced atomic layer deposition
72Effect of in situ hydrogen plasma treatment on zinc oxide grown using low temperature atomic layer deposition
73Inhibiting Metal Oxide Atomic Layer Deposition: Beyond Zinc Oxide