Fabrication of Si3N4-Based Artificial Basilar Membrane with ZnO Nanopillar Using MEMS Process
Type:
Journal
Info:
Journal of Sensors Volume 2017, Article ID 1308217, 11 pages
Date:
2017-05-31
Author Information
| Name | Institution |
|---|---|
| Jun-Hyuk Kwak | Center for Advanced Meta-Materials |
| Youngdo Jung | Korea Institute of Machinery and Materials |
| Kyungjun Song | Korea Institute of Machinery and Materials |
| Shin Hur | Korea Institute of Machinery and Materials |
Films
Film/Plasma Properties
Substrates
| Polyimide |
Notes
| 1050 |