Unknown Plasma Enhanced Atomic Layer Deposition Film Publications

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NumberTitle
1(Invited) Characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 Capacitors
23D-Branched ZnO/CdS Nanowire Arrays for Solar Water Splitting and the Service Safety Research
3650-V Double-Channel Lateral Schottky Barrier Diode With Dual-Recess Gated Anode
4823-mA/mm Drain Current Density and 945-MW/cm2 Baliga's Figure-of-Merit Enhancement-Mode GaN MISFETs With a Novel PEALD-AlN/LPCVD-Si3N4 Dual-Gate Dielectric
5A Bilayer Diffusion Barrier of ALD-Ru/ALD-TaCN for Direct Plating of Cu
6A New Pulse Plasma Enhanced Atomic Layer Deposition of Tungsten Nitride Diffusion Barrier for Copper Interconnect
7A scaled replacement metal gate InGaAs-on-Insulator n-FinFET on Si with record performance
8A study of the impact of in-situ argon plasma treatment before atomic layer deposition of Al2O3 on GaN based metal oxide semiconductor capacitor
9A sub-1-volt analog metal oxide memristive-based synaptic device with large conductance change for energy-efficient spike-based computing systems
10A wearable multiplexed silicon nonvolatile memory array using nanocrystal charge confinement
11AC-Capacitance Techniques for Interface Trap Analysis in GaN-Based Buried-Channel MIS-HEMTs
12Al2O3 Insertion Layer for Improved PEALD SiO2/(Al)GaN Interfaces
13Al2O3/TiO2 nanolaminate gate dielectric films with enhanced electrical performances for organic field-effect transistors
14ALD TaN Barrier for Enhanced Performance with Low Contact Resistance for 14nm Technology Node Cu Interconnects
15ALD-grown Ultrathin AlN Film for Passivation of AlGaN/GaN HEMTs
16AlGaN/GaN power schottky diodes with anode dimension up to 100 mm on 200 mm Si substrate
17AlN passivation by plasma-enhanced atomic layer deposition for GaN-based power switches and power amplifiers
18AlN/GaN heterostructure TFTs with plasma enhanced atomic layer deposition of epitaxial AlN thin film
19An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
20An improvement of HfO2/Ge interface by in situ remote N2 plasma pretreatment for Ge MOS devices
21An ultra-thin SiO2 ALD layer for void-free bonding of III-V material on silicon
22Anisotropic Inter-Poly Dielectric technology for conventional floating gate type flash memory
23Anti-stiction coating for mechanically tunable photonic crystal devices
24Atomic layer controlled deposition of silicon nitride with self-limiting mechanism
25Atomic layer deposited self-forming Ru-Mn diffusion barrier for seedless Cu interconnects
26Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes
27Atomic layer deposition of amorphous Ni-Ta-N films for Cu diffusion barrier
28Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
29Atomic Layer Deposition of Copper Seed Layers from a (hfac)Cu(VTMOS) Precursor
30Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
31Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant
32Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
33Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
34Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
35Atomic structure of conducting nanofilaments in TiO2 resistive switching memory
36Band alignment and electrical properties of Al2O3/β-Ga2O3 heterojunctions
37Bipolar resistive switching characteristics of low temperature grown ZnO thin films by plasma-enhanced atomic layer deposition
38Bipolar resistive switching in amorphous titanium oxide thin film
39Bipolar resistive switching properties of AlN films deposited by plasma-enhanced atomic layer deposition
40Capacitance spectroscopy of gate-defined electronic lattices
41Capacitance-voltage characterization of Al2O3/GaN-on-insulator (GaNOI) structures with TMAH surface treatment
42Carbon nanotube-supported Cu3N nanocrystals as a highly active catalyst for oxygen reduction reaction
43Characteristics of Charge Trap Flash Memory with Al2O3/(Ta/Nb)Ox/Al2O3 Multi-Layer
44Characteristics of WNxCy films deposited using remote plasma atomic layer deposition with (MeCp)W(CO)2(NO) for Cu diffusion barrier
45Characterization of hafnium oxide resistive memory layers deposited on copper by atomic layer deposition
46Characterization of HfOxNy thin film formation by in-situ plasma enhanced atomic layer deposition using NH3 and N2 plasmas
47Characterization of SiNx/AlN passivation stack with epitaxial AlN grown on AlGaN/GaN heterojunctions by plasma-enhanced atomic layer deposition
48Charge effects of ultrafine FET with nanodot type floating gate
49Chemical Protection of Polycarbonate Surfaces by Atomic Layer Deposition of Alumina with Oxygen Plasma Pretreatment
50Chemical reactions during plasma-enhanced atomic layer deposition of SiO2 films employing aminosilane and O2/Ar plasma at 50°C
51Chemically-tunable ultrathin silsesquiazane interlayer for n-type and p-type organic transistors on flexible plastic
52CMOS-compatible Replacement Metal Gate InGaAs-OI FinFET With ION= 156 μA/μm at VDD= 0.5 V and IOFF= 100 nA/μm
53Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
54Comparative study on interface and bulk charges in AlGaN/GaN metal-insulator-semiconductor heterostructures with Al2O3, AlN, and Al2O3/AlN laminated dielectrics
55Comparative study on nitridation and oxidation plasma interface treatment for AlGaN/GaN MIS-HEMTs with AlN gate dielectric
56Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition
57Comparison of the Low-Frequency Noise of Bulk Triple-Gate FinFETs With and Without Dynamic Threshold Operation
58Compatibility of AlN/SiNx Passivation Technique with High-Temperature Process
59Compatibility of AlN/SiNx Passivation With LPCVD-SiNx Gate Dielectric in GaN-Based MIS-HEMT
60Conformal Formation of (GeTe2)(1-x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories
61Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer
62Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
63Controlling threshold voltage and leakage currents in vertical organic field-effect transistors by inversion mode operation
64Correlation of interface states/border traps and threshold voltage shift on AlGaN/GaN metal-insulator-semiconductor high-electron-mobility transistors
65Coupled used of SKP and C-V measurements to highlight the charge distribution and behavior in the Si/SiO2/Al2O3 stack for silicon solar cells surface passivation
66Detailed Atomistic Modeling of Si(110) Passivation by Atomic Layer Deposition of Al2O3
67Detecting structural variances of Co3O4 catalysts by controlling beam-induced sample alterations in the vacuum of a transmission electron microscope
68Detection of Streptavidin-Biotin Complexes Using a Highly Sensitive AlGaN/GaN-Based Extended-Gate MISHEMT-Type Biosensor
69Device performance tuning of Ge gate-all-around tunneling field effect transistors by means of GeSn: Potential and challenges
70Device Performances Related to Gate Leakage Current in Al2O3/AlGaN/GaN MISHFETs
71DFT modeling of plasma-assisted atomic layer deposition for Si(110) passivation: formation of boehmite-like chains as γ-Al2O3 precursors
72DIBL in enhanced dynamic threshold operation of UTBB SOI with different drain engineering at high temperatures
73Direct deposition of aluminum oxide gate dielectric on graphene channel using nitrogen plasma treatment
74Direct measurement of coherent phonon dynamics in solution-processed stibnite thin films
75Disrupted Attosecond Charge Carrier Delocalization at a Hybrid Organic/Inorganic Semiconductor Interface
76Distribution and coverage of 40 nm gold nano-particles on aluminum and hafnium oxide using electrophoretic method and fabricated MOS structures
77Dynamic threshold voltage influence on Ge pMOSFET hysteresis
78Dynamic tuning of plasmon resonance in the visible using graphene
79Effect of Al2O3 Buffer Layers on the Properties of Sputtered VO2 Thin Films
80Effect of Al2O3 insertion on the electrical properties of SrTiO3 thin films: A comparison between Al2O3-doped SrTiO3 and SrTiO3/Al2O3/SrTiO3 sandwich structure
81Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors
82Effect of annealing conditions on formation of SrRuO3 films by interfacial reaction of SrO/RuO2 bi-layer films
83Effect of Fluoride-based Plasma Treatment on the Performance of AlGaN/GaN MISHFET
84Effect of Hydrogen in Gate Insulator on NBIS Performance of Oxide Thin Film Transistor
85Effect of hydrogen peroxide pretreatment on ZnO-based metal-semiconductor-metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition
86Effect of Plasma Power of Plasma Enhanced Atomic Layer Deposition Process for Gate Insulator Deposition in Top-Gate Thin-Film Transistors
87Effect of Reaction Mechanism on Precursor Exposure Time in Atomic Layer Deposition of Silicon Oxide and Silicon Nitride
88Effective work function modulation of the bilayer metal gate stacks by the Hf-doped thin TiN interlayer prepared by the in-situ atomic layer doping technique
89Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO2
90Effects of interface oxidation on the transport behavior of the two-dimensional-electron-gas in AlGaN/GaN heterostructures by plasma-enhanced-atomic-layer-deposited AlN passivation
91Effects of NH3 pulse plasma on atomic layer deposition of tungsten nitride diffusion barrier
92Effects of rapid thermal annealing on the properties of AlN films deposited by PEALD on AlGaN/GaN heterostructures
93Effects of rapid thermal annealing on the properties of HfO2/La2O3 nanolaminate films deposited by plasma enhanced atomic layer deposition
94Effects of surface nature of different semiconductor substrates on the plasma enhanced atomic layer deposition growth of Al2O3 gate dielectric thin films
95Effects of Surface Passivation and Deposition Methods on the 1/f Noise Performance of AlInN/AlN/GaN High Electron Mobility Transistors
96Effects of TiO2 Interfacial Atomic Layers on Device Performances and Exciton Dynamics in ZnO Nanorod Polymer Solar Cells
97Efficiency enhancement of InGaN/GaN blue light-emitting diodes with top surface deposition of AlN/Al2O3
98Electrical and chemical characterization of Al2O3 passivation layer deposited by plasma-assisted atomic layer deposition in c-Si solar cells
99Electrical and Corrosion Properties of Titanium Aluminum Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
100Electrical and physical characteristics of high-k gated MOSFETs with in-situ H2O and O2 plasma formed interfacial layer
101Electrical characteristics and step coverage of ZrO2 films deposited by atomic layer deposition for through-silicon via and metal-insulator-metal applications
102Electrical Characteristics of Multilayer MoS2 FET's with MoS2/Graphene Heterojunction Contacts
103Electrical Characteristics of n, p-In0.53Ga0.47As MOSCAPs With In Situ PEALD-AlN Interfacial Passivation Layer
104Electrical Characteristics of p-Type Bulk Si Fin Field-Effect Transistor Using Solid-Source Doping With 1-nm Phosphosilicate Glass
105Electrical characterization and reliability analysis of Al2O3/AlGaN/GaN MISH structure
106Electrical characterization of the slow boron oxygen defect component in Czochralski silicon
107Electrical characterizations of MIS structures based on variable-gap n(p)-HgCdTe grown by MBE on Si(0 1 3) substrates
108Electrical Measurement Under Atmospheric Conditons of PbSe Nanocrystal Thin Films Passivated by Remote Plasma Atomic Layer Deposition of Al2O3
109Electrodynamic response and local tunneling spectroscopy of strongly disordered superconducting TiN films
110Electron channel mobility in silicon-doped Ga2O3 MOSFETs with a resistive buffer layer
111Electron Transport Across Ultrathin Ferroelectric Hf0.5Zr0.5O2 Films on Si
112Electronic Instabilities Leading to Electroformation of Binary Metal Oxide-based Resistive Switches
113Energy transformation of plasmonic photocatalytic oxidation on 1D quantum well of platinum thin film
114Enhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition
115Enhanced electrical and reliability characteristics in HfON gated Ge p-MOSFETs with H2 and NH3 plasma treated interfacial layers
116Enhanced electrochemical performance of surface-treated Li[Ni0.8Co0.1Mn0.1]O2 cathode material for lithium-ion batteries
117Enhanced Methanol Oxidation with Annealed Atomic Layer Deposited Platinum Nanoparticles on Carbon Nanotubes
118Enhancement of barrier properties of aluminum oxide layer by optimization of plasma-enhanced atomic layer deposition process
119Enhancement of mobility in ultra-thin-body GeOI p-channel metal-oxide-semiconductor field effect transistors with Si-passivated back interfaces
120Enhancement of reliability and stability for transparent amorphous indium-zinc-tin-oxide thin film transistors
121Enhancement-mode AlGaN/GaN MIS-HEMTs with low threshold voltage hysteresis using damage-free neutral beam etched gate recess
122Epitaxial 1D electron transport layers for high-performance perovskite solar cells
123Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
124Evaluation of Thermal Versus Plasma-Assisted ALD Al2O3 as Passivation for InAlN/AlN/GaN HEMTs
125Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition
126Experimental verification of electro-refractive phase modulation in graphene
127Extensionless UTBB FDSOI Devices in Enhanced Dynamic Threshold Mode under Low Power Point of View
128Fabrication and Characterization of an Extended-Gate AlGaN/GaN-Based Heterostructure Field-Effect Transistor-Type Biosensor for Detecting Immobilized Streptavidin-Biotin Protein Complexes
129Fabrication of Highly Ordered and Well-Aligned PbTiO3/TiN Core-Shell Nanotube Arrays
130Fabrication of nanodamascene metallic single electron transistors with atomic layer deposition of tunnel barrier
131Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils
132Fabrication of Si3N4-Based Artificial Basilar Membrane with ZnO Nanopillar Using MEMS Process
133Fast Flexible Plastic Substrate ZnO Circuits
134Fermi level unpinning of GaSb (100) using plasma enhanced atomic layer deposition of Al2O3
135Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks
136Ferroelectricity of HfZrO2 in Energy Landscape With Surface Potential Gain for Low-Power Steep-Slope Transistors
137Field-Plated Ga2O3 MOSFETs With a Breakdown Voltage of Over 750 V
138Flexible integrated circuits and multifunctional electronics based on single atomic layers of MoS2 and graphene
139Flexible Technologies for Self-Powered Wearable Health and Environmental Sensing
140Fluorinated polymer-grafted organic dielectrics for organic field-effect transistors with low-voltage and electrical stability
141Formation of Ni silicide from atomic layer deposited Ni
142Forming-free metal-oxide ReRAM by oxygen ion implantation process
143Fundamental reaction of RT gallium oxide atomic layer deposition investigated by IR absorption spectroscopy
144Ga2O3 MOSFETs Using Spin-On-Glass Source/Drain Doping Technology
145GaN Nanowire MOSFET With Near-Ideal Subthreshold Slope
146Gate Insulator for High Mobility Oxide TFT
147Gate Recessed Quasi-Normally OFF Al2O3/AlGaN/GaN MIS-HEMT With Low Threshold Voltage Hysteresis Using PEALD AlN Interfacial Passivation Layer
148Graphene based on-chip variable optical attenuator operating at 855 nm wavelength
149Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
150Graphene photodetectors with a bandwidth >76 GHz fabricated in a 6" wafer process line
151Graphene-based bimorphs for micron-sized, autonomous origami machines
152Graphene-based MMIC process development and RF passives design
153Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
154Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)2 and oxygen remote plasma
155Growth kinetics for temperature-controlled atomic layer deposition of GaN using trimethylgallium and remote-plasma-excited NH3
156Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma
157Growth of silica nanowires in vacuum
158Growth of tantalum nitride film as a Cu diffusion barrier by plasma-enhanced atomic layer deposition from bis((2-(dimethylamino)ethyl)(methyl)amido)methyl(tert-butylimido)tantalum complex
159Growth of ZnO nanorods on fluorine-doped tin oxide substrate without catalyst by radio-frequency magnetron sputtering
160Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings
161Hanle-effect measurements of spin injection from Mn5Ge3C0.8/Al2O3-contacts into degenerately doped Ge channels on Si
162High Energy Density Capacitor By Plasma-Treated ALD BaTiO3 Thin Films
163High Mobility (210cm2/Vs), High Capacitance (7.2uF/cm2) ZrO2 on GaN Metal Oxide Semiconductor Capacitor via ALD
164High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition
165High performance AlGaN/GaN HEMTs with AlN/SiNx passivation
166High Performance and Low power Monolithic Three-Dimensional Sub-50 nm Poly Si Thin film transistor (TFTs) Circuits
167High Performance CoOx/Si Photoanodes: Accessing Structural Disorder for Improved Catalytic Activity via Atomic Layer Deposition
168High performance graphene field effect transistors on an aluminum nitride substrate with high surface phonon energy
169High pulsed current density β-Ga2O3 MOSFETs verified by an analytical model corrected for interface charge
170High-density plasma etching characteristics of indium-gallium-zinc oxide thin films in CF4/Ar plasma
171High-Mobility Indium Oxide Thin-Film Transistors by Means of Plasma-Enhanced Atomic Layer Deposition
172High-performance normally off AlGaN/GaN-on-Si HEMTs with partially recessed SiNx MIS structure
173Highly efficient and bending durable perovskite solar cells: toward a wearable power source
174Highly reflective polymeric substrates functionalized utilizing atomic layer deposition
175Highly transparent low capacitance plasma enhanced atomic layer deposition Al2O3-HfO2 tunnel junction engineering
176Highly Uniform, Electroforming-Free, and Self-Rectifying Resistive Memory in the Pt/Ta2O5/HfO2-x/TiN Structure
177Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu
178Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes
179Hydrogen induced passivation of Si interfaces by Al2O3 films and SiO2/Al2O3 stacks
180Impact of AlN Interfacial Dipole on Effective Work Function of Ni and Band Alignment of Ni/HfO2/In0.53Ga0.47As Gate-Stack
181Impact of gate insulator on the dc and dynamic performance of AlGaN/GaN MIS-HEMTs
182Impact of oxygen plasma on nitrided and annealed atomic layer deposited SiO2/high-k/metal gate for high-voltage input and output fin-shaped field effect transistor devices
183Impacts of conduction band offset and border traps on Vth instability of gate recessed normally-off GaN MIS-HEMTs
184Impedance spectroscopy analysis on the effects of TiO2 interfacial atomic layers in ZnO nanorod polymer solar cells: Effects of interfacial charge extraction on diffusion and recombination
185Improved Interface and Transport Properties of AlGaN/GaN MIS-HEMTs With PEALD-Grown AlN Gate Dielectric
186Improved retention times in UTBOX nMOSFETs for 1T-DRAM applications
187Improved understanding of recombination at the Si/Al2O3 interface
188Improvement of interfacial and electrical properties of Al2O3/n-Ga0.47In0.53As for III-V impact ionization MOSFETs
189Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors
190Improvement of the thermal stability of nickel silicide using a ruthenium interlayer deposited via remote plasma atomic layer deposition
191Improvement on the Passivation Effect of Al2O3 Layer Deposited by PA-ALD in Crystalline Silicon Solar Cells
192In situ atomic layer nitridation on the top and down regions of the amorphous and crystalline high-K gate dielectrics
193Industrially relevant Al2O3 deposition techniques for the surface passivation of Si solar cells
194Influence of Al2O3 Gate Dielectric on Transistor Properties for IGZO Thin Film Transistor
195Influence of Al2O3 layer insertion on the electrical properties of Ga-In-Zn-O thin-film transistors
196Influence of infrared radiation on the electrical characteristics of the surface-barrier nanostructures based on MBE HgCdTe
197Influence of Pre and Post-treatments on Plasma Enhanced ALD SiO2 and Al2O3 layers on GaN
198Influence of the charge trap density distribution in a gate insulator on the positive-bias stress instability of amorphous indium-gallium-zinc oxide thin-film transistors
199Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources
200Initial reaction of hafnium oxide deposited by remote plasma atomic layer deposition method
201Integrated Semiconductor/Catalyst Assemblies for Sustained Photoanodic Water Oxidation
202Interface and plasma damage analysis of PEALD TaCN deposited on HfO2 for advanced CMOS studied by angle resolved XPS and C-V
203Interface effect on dielectric constant of HfO2/Al2O3 nanolaminate films deposited by plasma-enhanced atomic layer deposition
204Interface engineering of an AlNO/AlGaN/GaN MIS diode induced by PEALD alternate insertion of AlN in Al2O3
205Interface Properties of Nickel-silicide Films Deposited by Using Plasma-assisted Atomic Layer Deposition
206Interfaces of high-k dielectrics on GaAs: Their common features and the relationship with Fermi level pinning
207Investigation of Bulk and DTMOS triple-gate devices under 60 MeV proton irradiation
208Investigation of Tungsten Nitride Deposition Using Tungsten Hexafluoride Precursor for Via and Plug Metallization
209IrO2 Nanodot Formation by Plasma Enhanced Atomic Layer Deposition as a Charge Storage Layer
210Junction-less nanowire based photodetector: Role of nanowire width
211Junctionless Gate-All-Around pFETs Using In-situ Boron-Doped Ge Channel on Si
212Kinetics of the permanent deactivation of the boron-oxygen complex in crystalline silicon as a function of illumination intensity
213Leakage and trapping characteristics in Au-free AlGaN/GaN Schottky barrier diodes fabricated on C-doped buffer layers
214Leakage Current Reduction in ALD-Al2O3 Dielectric Deposited on Si by High Pressure Deuterium Oxide Annealing
215Lifetimes exceeding 1ms in 1-Ohm-cm boron-doped Cz-silicon
216Light-induced activation and deactivation of bulk defects in boron-doped float-zone silicon
217Liquid-phase-deposited siloxane-based capping layers for silicon solar cells
218Liquids on-chip: direct storage and release employing micro-perforated vapor barrier films
219Low Dit HfO2/Al2O3/In0.53Ga0.47As gate stack achieved with plasma-enhanced atomic layer deposition
220Low Resistive Edge Contacts to CVD-Grown Graphene Using a CMOS Compatible Metal
221Low temperature plasma-enhanced ALD enables cost-effective spacer defined double patterning (SDDP)
222Low-temperature atomic layer epitaxy of AlN ultrathin films by layer-by-layer, in-situ atomic layer annealing
223Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
224Low-thermal budget flash light annealing for Al2O3 surface passivation
225Mesoporous perovskite solar cells and the role of nanoscale compact layers for remarkable all-round high efficiency under both indoor and outdoor illumination
226Metal-insulator-semiconductor structure using Ga2O3 layer by plasma enhanced atomic layer deposition
227Metallic Copper Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition of Air Stable Precursors
228Method of sealing pores in porous low-k SiOC(-H) films fabricated using plasma-assisted atomic layer deposition
229Method to enhance atomic-layer deposition of tungsten-nitride diffusion barrier for Cu interconnect
230Minority carrier lifetime limitations in Si wafer solar cells with gallium phosphide window layers
231Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition
232Multi-functional touch sensors with strained P(VDF-TrFE) deposited on metal oxide thin film transistor
233Nanoscopic structural rearrangements of the Cu-filament in conductive-bridge memories
234Negative differential resistance in the I-V curves of Al2O3/AlGaN/GaN MIS structures
235New grating concepts in the NIR and SWIR spectral band for high resolution earth-observation spectrometers
236New materials for memristive switching
237Nitride memristors
238Non-destructive acoustic metrology and void detection in 3x50μm TSV
239Normally-off AlGaN/GaN recessed MOS-HEMTs on normally-on epitaxial structures for microwave power applications
240Normally-off AlGaN/GaN-on-Si metal-insulator-semiconductor heterojunction field-effect transistor with nitrogen-incorporated silicon oxide gate insulator
241On the composition of luminescence spectra from heavily doped p-type silicon under low and high excitation
242On the equilibrium concentration of boron-oxygen defects in crystalline silicon
243Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition
244Optimization of the Surface Structure on Black Silicon for Surface Passivation
245Organic thin-film transistors with sub-10-micrometer channel length with printed polymer/carbon nanotube electrodes
246Oxidation precursor dependence of atomic layer deposited Al2O3 films in a-Si:H(i)/Al2O3 surface passivation stacks
247Oxide Vertical TFTs for the Application to the Ultra High Resolution Display
248Oxygen migration in TiO2-based higher-k gate stacks
249Partitioning Electrostatic and Mechanical Domains in Nanoelectromechanical Relays
250Passivation of Al2O3/TiO2 on monocrystalline Si with relatively low reflectance
251Patterning of silicon nitride for CMOS gate spacer technology. III. Investigation of synchronously pulsed CH3F/O2/He plasmas
252PEALD of Copper using New Precursors for Next Generation of Interconnections
253PEALD YSZ-based bilayer electrolyte for thin film-solid oxide fuel cells
254Performance enhancement of normally-off Al2O3/AlN/GaN MOS-Channel-HEMTs with an ALD-grown AlN interfacial layer
255Performance of AlGaN/GaN MISHFET using dual-purpose thin Al2O3 layer for surface protection and gate insulator
256Performance Optimization of Au-Free Lateral AlGaN/GaN Schottky Barrier Diode With Gated Edge Termination on 200-mm Silicon Substrate
257Photo-Patternable ZnO Thin Films Based on Cross-Linked Zinc Acrylate for Organic/Inorganic Hybrid Complementary Inverters
258Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate
259Photoluminescence and electroluminescence from Ge/strained GeSn/Ge quantum wells
260Photovoltaic Rudorffites: Lead-Free Silver Bismuth Halides Alternative to Hybrid Lead Halide Perovskites
261Plasma enhanced atomic layer deposition of silicon nitride using neopentasilane
262Plasma enhanced atomic layer deposition of SiNx:H and SiO2
263Plasma Enhanced Atomic Layer Deposition of TaN Films for Advanced Interconnects
264Plasma Enhanced Atomic Layer Deposition Passivated HfO2/AlN/In0.53Ga0.47As MOSCAPs With Sub-Nanometer Equivalent Oxide Thickness and Low Interface Trap Density
265Plasma nitridation of atomic layer deposition (ALD) Al2O3 by NH3 in plasma-enhanced chemical vapor deposition (PECVD) for silicon solar cell
266Plasma-assisted atomic layer deposition and post-annealing enhancement of low resistivity and oxygen-free nickel nano-films using nickelocene and ammonia precursors
267Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
268Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Organic Precursor Tetrakis(ethylmethylamido)Titanium (TEMAT)
269Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material
270Plasma-enhanced atomic layer deposition for plasmonic TiN
271Plasma-enhanced atomic layer deposition of tantalum nitride thin films using tertiary-amylimido-tris(dimethylamido)tantalum and hydrogen plasma
272Plasma-Enhanced Atomic Layer Deposition Processed Amorphous Indium Zinc Oxide Thin-Film Transistor for Ultra-High Definition Display Application
273Platinum thin films with good thermal and chemical stability fabricated by inductively coupled plasma-enhanced atomic layer deposition at low temperatures
274Poly-Si gate electrodes for AlGaN/GaN HEMT with high reliability and low gate leakage current
275Post Plasma Oxidation Processed ALD Al2O3/Hf1-xZrxO2 Thin Films on Ge Substrates: Reliability
276Potassium Permanganate-Based Slurry to Reduce the Galvanic Corrosion of the Cu/Ru/TiN Barrier Liner Stack during CMP in the BEOL Interconnects
277Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces
278Properties of HfAlO film deposited by plasma enhanced atomic layer deposition
279Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition
280Properties of plasma-enhanced atomic layer deposited TiCx films as a diffusion barrier for Cu metallization
281Pt/Ta2O5/HfO2-x/Ti Resistive Switching Memory Competing with Multilevel NAND Flash
282Reliability and failure physics of GaN HEMT, MIS-HEMT and p-gate HEMTs for power switching applications: Parasitic effects and degradation due to deep level effects and time-dependent breakdown phenomena
283Reliability and parasitic issues in GaN-based power HEMTs: a review
284Reliability testing of high aspect ratio through silicon vias fabricated with atomic layer deposition barrier, seed layer and direct plating and material properties characterization of electrografted insulator, barrier and seed layer for 3-D integration
285Remote plasma atomic layer deposited Al2O3 4H-SiC MOS capacitor with remote H2 plasma passivation and post metallization annealing
286Room temperature CO2 detection using interdigitated capacitors with heteropolysiloxane sensing films
287RT Ga2O3 atomic layer deposition by using trimethylgallium and water-oxygen plasma
288Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
289Schottky Barrier Height Reduction at Interface Between GZO Transparent Electrode and InP/InGaAs Structure by Zinc Driven-in Step and Nickel Oxide Insertion
290Self-aligned ZnO thin-film transistors with 860 MHz fT and 2 GHz fmax for large-area applications
291Self-catalysis by aminosilanes and strong surface oxidation by O2 plasma in plasma-enhanced atomic layer deposition of high-quality SiO2
292Semiconductor-like nanofilms assembled with AlN and TiN laminations for nearly ideal graphene-based heterojunction devices
293Silicon film thickness influence on enhanced dynamic threshold UTBB SOI nMOSFETs
294Silicon nanowire networks for multi-stage thermoelectric modules
295Simultaneous Roll Transfer and Interconnection of Flexible Silicon NAND Flash Memory
296Simultaneous scanning tunneling microscopy and synchrotron X-ray measurements in a gas environment
297SiNx passivated GaN HEMT by plasma enhanced atomic layer deposition
298SnO2 nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance
299Spectroscopy and control of near-surface defects in conductive thin film ZnO
300Stability of effective lifetime of float-zone silicon wafers with AlOx surface passivation schemes under illumination at elevated temperature
301Steady-state Thermal Conductivity Measurement of Dielectric Stacks for Phase-Change Memory Power Reduction
302Stretchable Carbon Nanotube Charge-Trap Floating-Gate Memory and Logic Devices for Wearable Electronics
303Structural and electrical properties of ultra-thin high-k ZrO2 film on nitride passivated Ge(100) prepared by PEALD
304Structural characteristics of epitaxial SnO2 films deposited on a- and m-cut sapphire by ALD
305Study on the electrical characteristics of in situ PEALD-passivated HfO2/In0.53Ga0.47As MOSCAP and MOSFET structures
306Stuffing-enabled surface confinement of silanes used as sealing agents on CF4 plasma-exposed 2.0 p-OSG films
307Sub-0.5 nm Equivalent Oxide Thickness Scaling for Si-Doped Zr1-xHfxO2 Thin Film without Using Noble Metal Electrode
308Surface and sensing properties of PE-ALD SnO2 thin film
309Surface Etching of TiO2 Thin Films Using High Density Cl2/Ar Plasma
310Surface oxidation model in plasma enhanced atomic layer deposition for silicon oxide films including various aminosilane precursors
311Surface treatments on AlGaN/GaN heterostructures for gate dielectric Al2O3 thin films grown by Atomic Layer Deposition
312Symmetrical Al2O3-based passivation layers for p- and n-type silicon
313Synaptic Plasticity and Learning Behaviors Mimicked in Single Inorganic Synapses of Pt/HfOx/ZnOx/TiN Memristive System
314Synthesis of Pt@TiO2@CNTs Hierarchical Structure Catalyst by Atomic Layer Deposition and Their Photocatalytic and Photoelectrochemical Activity
315Tailoring the Electrical Properties of HfO2 MOS-Devices by Aluminum Doping
316Temperature control for the gate workfunction engineering of TiC film by atomic layer deposition
317Temperature-controlled atomic layer deposition of GaN using plasma-excited nitrogen source
318Terahertz Quantum Plasmonics of Nanoslot Antennas in Nonlinear Regime
319The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
320The Properties of Cu Thin Films on Ru Depending on the ALD Temperature
321Theoretical and Experimental Investigation of Graphene/High-κ/p-Si Junctions
322Theoretical Understanding of the Reaction Mechanism of SiO2 Atomic Layer Deposition
323Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction
324Thin effective oxide thickness (~0.5 nm) and low leakage current gate dielectric for Ge MOS devices by plasma nitrided Al2O3 intermediate layer
325Threshold voltage controlled by gate area and gate recess in inverted trapezoidal trigate AlGaN/GaN MOS high-electron-mobility transistors with photoenhanced chemical and plasma-enhanced atomic layer deposition oxides
326TiCl4 as a Precursor in the TiN Deposition by ALD and PEALD
327Time-Dependent Breakdown Mechanisms and Reliability Improvement in Edge Terminated AlGaN/GaN Schottky Diodes Under HTRB Tests
328TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
329Total-dose radiation response and and post-irradiation annealing response of Hafnium capacitors
330Toward reliable MIS- and MOS-gate structures for GaN lateral power devices
331Toward Understanding Positive Bias Temperature Instability in Fully Recessed-Gate GaN MISFETs
332Transient characterization of the electroforming process in TiO2 based resistive switching devices
333Trapping and reliability issues in GaN-based MIS HEMTs with partially recessed gate
334Trilayer Tunnel Selectors for Memristor Memory Cells
335Tunable Work-Function Engineering of TiC-TiN Compound by Atomic Layer Deposition for Metal Gate Applications
336Tuning the phase transitions of VO2 thin films on silicon substrates using ultrathin Al2O3 as buffer layers
337Two-stage permanent deactivation of the boron-oxygen-related recombination center in crystalline silicon
338Ultralow threading dislocation density in GaN epilayer on near-strain-free GaN compliant buffer layer and its applications in hetero-epitaxial LEDs
339Ultraviolet photodetector based on MgxZn1-xO films using plasma-enhanced atomic layer deposition
340Understanding and Eliminating Hysteresis for Highly Efficient Planar Perovskite Solar Cells
341Understanding and optimizing the floating body retention in FDSOI UTBOX
342Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
343Vertical Ge and GeSn heterojunction gate-all-around tunneling field effect transistors
344Via sidewall insulation for through cell via contacts
345Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
346Wideband frequency and in situ characterization of ultra thin ZrO2 and HfO2 films for integrated MIM capacitors
347X-ray Photoelectron Spectroscopy Analyses of Atomic Layer Deposition-Prepared Titanium-Dioxide Thin Films with Oxygen Sources and Their Annealing Effect
348ZrO2-coated SiC nanowires prepared by plasma-enhanced atomic layer chemical vapor deposition


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