Publication Information

Title:
Optimization of the Surface Structure on Black Silicon for Surface Passivation
Type:
Journal
Info:
Nanoscale Research Letters (2017) 12:193
Date:
2017-02-09

Author Information

Name Institution
Xiaojie JiaChinese Academy of Sciences
Chunlan ZhouChinese Academy of Sciences
Wenjing WangChinese Academy of Sciences

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Substrates

Silicon

Keywords

Passivation
Solar

Notes

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