Optimization of the Surface Structure on Black Silicon for Surface Passivation
Type:
Journal
Info:
Nanoscale Research Letters (2017) 12:193
Date:
2017-02-09
Author Information
| Name | Institution |
|---|---|
| Xiaojie Jia | Chinese Academy of Sciences |
| Chunlan Zhou | Chinese Academy of Sciences |
| Wenjing Wang | Chinese Academy of Sciences |
Films
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Substrates
| Silicon |
Notes
| 1113 |