Compatibility of AlN/SiNx Passivation Technique with High-Temperature Process
Type:
Conference Proceedings
Info:
CS ManTech Conference, May 16th - 19th, 2016
Date:
2016-05-16
Author Information
| Name | Institution |
|---|---|
| Mengyuan Hua | Hong Kong University of Science and Technology |
| Yunyou Lu | Hong Kong University of Science and Technology |
| Shenghou Liu | Hong Kong University of Science and Technology |
| Cheng Liu | Hong Kong University of Science and Technology |
| Kai Fu | Chinese Academy of Sciences |
| Yong Cai | Chinese Academy of Sciences |
| Baoshun Zhang | Chinese Academy of Sciences |
| Kevin J. Chen | Hong Kong University of Science and Technology |
Films
Film/Plasma Properties
Substrates
| GaN |
Notes
| 923 |