Kevin J. Chen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kevin J. Chen returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1600 V High-Performance AlGaN/GaN HEMTs with AlN/SiNx Passivation
2650-V Double-Channel Lateral Schottky Barrier Diode With Dual-Recess Gated Anode
3AC-Capacitance Techniques for Interface Trap Analysis in GaN-Based Buried-Channel MIS-HEMTs
4ALD-grown Ultrathin AlN Film for Passivation of AlGaN/GaN HEMTs
5AlN passivation by plasma-enhanced atomic layer deposition for GaN-based power switches and power amplifiers
6Characterization of SiNx/AlN passivation stack with epitaxial AlN grown on AlGaN/GaN heterojunctions by plasma-enhanced atomic layer deposition
7Compatibility of AlN/SiNx Passivation Technique with High-Temperature Process
8Compatibility of AlN/SiNx Passivation With LPCVD-SiNx Gate Dielectric in GaN-Based MIS-HEMT
9Effects of interface oxidation on the transport behavior of the two-dimensional-electron-gas in AlGaN/GaN heterostructures by plasma-enhanced-atomic-layer-deposited AlN passivation
10Efficiency enhancement of InGaN/GaN blue light-emitting diodes with top surface deposition of AlN/Al2O3
11Improved Gate Dielectric Deposition and Enhanced Electrical Stability for Single-Layer MoS2 MOSFET with an AlN Interfacial Layer
12Plasma-Enhanced Atomic Layer Deposition of AlN Epitaxial Thin Film for AlN/GaN Heterostructure TFTs
13Toward reliable MIS- and MOS-gate structures for GaN lateral power devices