Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Toward reliable MIS- and MOS-gate structures for GaN lateral power devices
Type:
Journal
Info:
physica status solidi (a), Volume 213, Issue 4, pages 861–867, April 2016
Date:
2016-01-10
Author Information
Name | Institution |
---|---|
Kevin J. Chen | Hong Kong University of Science and Technology |
Shu Yang | Hong Kong University of Science and Technology |
Shenghou Liu | Hong Kong University of Science and Technology |
Cheng Liu | Hong Kong University of Science and Technology |
Mengyuan Hua | Hong Kong University of Science and Technology |
Films
Film/Plasma Properties
Substrates
GaN |
Keywords
Notes
812 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |