Mengyuan Hua Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mengyuan Hua returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Compatibility of AlN/SiNx Passivation Technique with High-Temperature Process
2Compatibility of AlN/SiNx Passivation With LPCVD-SiNx Gate Dielectric in GaN-Based MIS-HEMT
3Toward reliable MIS- and MOS-gate structures for GaN lateral power devices
4650-V Double-Channel Lateral Schottky Barrier Diode With Dual-Recess Gated Anode
5Efficiency enhancement of InGaN/GaN blue light-emitting diodes with top surface deposition of AlN/Al2O3
6Improved Gate Dielectric Deposition and Enhanced Electrical Stability for Single-Layer MoS2 MOSFET with an AlN Interfacial Layer