Publication Information

Title:
600 V High-Performance AlGaN/GaN HEMTs with AlN/SiNx Passivation
Type:
Conference Proceedings
Info:
CS MANTECH Conference 2013 Proceedings 255-258
Date:
2013-05-13

Author Information

Name Institution
Zhikai TangHong Kong University of Science and Technology
Sen HuangChinese Academy of Sciences
Qimeng JiangHong Kong University of Science and Technology
Shenghou LiuHong Kong University of Science and Technology
Cheng LiuHong Kong University of Science and Technology
Kevin J. ChenHong Kong University of Science and Technology

Films

Plasma AlN

Hardware used: Unknown


Film/Plasma Properties

Characteristic: Transistor Characteristics
Analysis: Transistor Characterization

Substrates

AlGaN

Keywords

Notes

1382