Sen Huang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sen Huang returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effects of interface oxidation on the transport behavior of the two-dimensional-electron-gas in AlGaN/GaN heterostructures by plasma-enhanced-atomic-layer-deposited AlN passivation
2AlN passivation by plasma-enhanced atomic layer deposition for GaN-based power switches and power amplifiers
3Plasma-Enhanced Atomic Layer Deposition of AlN Epitaxial Thin Film for AlN/GaN Heterostructure TFTs
4600 V High-Performance AlGaN/GaN HEMTs with AlN/SiNx Passivation
5ALD-grown Ultrathin AlN Film for Passivation of AlGaN/GaN HEMTs