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Publication Information
Title:
Characterization of SiNx/AlN passivation stack with epitaxial AlN grown on AlGaN/GaN heterojunctions by plasma-enhanced atomic layer deposition
Type:
Journal
Info:
2015 Appl. Phys. Express 8 064101
Date:
2015-04-19
Author Information
Name | Institution |
---|---|
Yunyou Lu | Hong Kong University of Science and Technology |
Qimeng Jiang | Hong Kong University of Science and Technology |
Zhikai Tang | Hong Kong University of Science and Technology |
Shu Yang | Hong Kong University of Science and Technology |
Cheng Liu | Hong Kong University of Science and Technology |
Kevin J. Chen | Hong Kong University of Science and Technology |
Films
Film/Plasma Properties
Substrates
Keywords
Notes
437 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |