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Publication Information

Title: Characterization of SiNx/AlN passivation stack with epitaxial AlN grown on AlGaN/GaN heterojunctions by plasma-enhanced atomic layer deposition

Type: Journal

Info: 2015 Appl. Phys. Express 8 064101

Date: 2015-04-19

DOI: http://dx.doi.org/10.7567/APEX.8.064101

Author Information

Name

Institution

Yunyou Lu

Hong Kong University of Science and Technology

Qimeng Jiang

Hong Kong University of Science and Technology

Zhikai Tang

Hong Kong University of Science and Technology

Shu Yang

Hong Kong University of Science and Technology

Cheng Liu

Hong Kong University of Science and Technology

Kevin J. Chen

Hong Kong University of Science and Technology

Films

Plasma AlN using Unknown

Deposition Temperature Range N/A

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437

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I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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