Baoshun Zhang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Baoshun Zhang returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Annealing effects on properties of Ga2O3 films deposited by plasma-enhanced atomic layer deposition
2Compatibility of AlN/SiNx Passivation Technique with High-Temperature Process
3Compatibility of AlN/SiNx Passivation With LPCVD-SiNx Gate Dielectric in GaN-Based MIS-HEMT