Publication Information

Title:
Band alignment and electrical properties of Al2O3/β-Ga2O3 heterojunctions
Type:
Journal
Info:
Appl. Phys. Lett. 104, 192104 (2014)
Date:
2014-05-03

Author Information

Name Institution
Takafumi KamimuraNational Institute of Information and Communications Technology

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Band Alignment
Analysis: XPS, X-ray Photoelectron Spectroscopy

Substrates

Ga2O3

Keywords

Heterojunctions

Notes

242