Inductively coupled plasma sources from Plasma ALD, LLC.


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Takafumi Kamimura Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Takafumi Kamimura returned 2 record(s).

NumberTitle
1Band alignment and electrical properties of Al2O3/β-Ga2O3 heterojunctions
2Epitaxially grown crystalline Al2O3 interlayer on β-Ga2O3 (010) and its suppressed interface state density