Search 1556 plasma ALD publications by:
Search 1556 plasma ALD publications by:
Vertical Ge and GeSn heterojunction gate-all-around tunneling field effect transistors
Type:
Journal
Info:
Nanoscale 2015, Volume 110, Issue , pp 59 - 64
Date:
2015-03-30
Author Information
Name | Institution |
---|---|
Jörg Schulze | Universitat Stuttgart |
Andreas Blech | Universitat Stuttgart |
Arnab Datta | Universitat Stuttgart |
Inga Anita Fischer | Universitat Stuttgart |
D. Haehnel | Universitat Stuttgart |
Sandra Naasz | Universitat Stuttgart |
Erlend Rolseth | Universitat Stuttgart |
Eva-Maria Tropper | Universitat Stuttgart |
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Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |