Andreas Blech Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Andreas Blech returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Device performance tuning of Ge gate-all-around tunneling field effect transistors by means of GeSn: Potential and challenges|
|2||Vertical Ge and GeSn heterojunction gate-all-around tunneling field effect transistors|