About Plasma ALD, LLC
The Plasma Enhanced Atomic Layer Deposition Publication Database is developed and maintained by Plasma ALD, LLC.
Plasma ALD, LLC designs and supplies compact inductively coupled plasma (ICP) sources for plasma-enhanced atomic layer deposition (PEALD), thin-film etching, surface cleaning, surface modification, and research plasma systems.
Our ICP sources are designed for integration with existing ALD and vacuum-processing equipment. Plasma ALD also provides plasma-source integration, process-development, and troubleshooting assistance based on decades of experience with low-pressure plasma processing and PEALD systems.
Researchers, universities, equipment manufacturers, and laboratories looking for an ICP plasma source or assistance adding plasma capability to an ALD system can learn more on our Plasma Sources page.