
Understanding and optimizing the floating body retention in FDSOI UTBOX
Type:
Journal
Info:
Nanoscale 2016, Volume 117, Issue , pp 123 - 129
Date:
2015-12-12
Author Information
Name | Institution |
---|---|
Marc Aoulaiche | Micron Technology Belgium |
Eddy Simoen | IMEC |
C. Caillat | Micron Technology Belgium |
L. Witters | IMEC |
K.K. Bourdelle | SOITEC |
Minh D. Nguyen | SOITEC-USA |
Joao Antonio Martino | University of Sao Paulo |
Cor Claeys | IMEC |
P. Fazan | Micron Technology Belgium |
M. Jurczak | IMEC |
Films
Film/Plasma Properties
Substrates
SiO2 |
Keywords
Notes
552 |