Publication Information

Title:
Understanding and optimizing the floating body retention in FDSOI UTBOX
Type:
Journal
Info:
Nanoscale 2016, Volume 117, Issue , pp 123 - 129
Date:
2015-12-12

Author Information

Name Institution
Marc AoulaicheMicron Technology Belgium
Eddy SimoenIMEC
C. CaillatMicron Technology Belgium
L. WittersIMEC
K.K. BourdelleSOITEC
Minh D. NguyenSOITEC-USA
Joao Antonio MartinoUniversity of Sao Paulo
Cor ClaeysIMEC
P. FazanMicron Technology Belgium
M. JurczakIMEC

Films

Plasma TiN

Hardware used: Unknown


Film/Plasma Properties

Substrates

SiO2

Keywords

Notes

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