Publication Information

Title: Understanding and optimizing the floating body retention in FDSOI UTBOX

Type: Journal

Info: Nanoscale 2016, Volume 117, Issue , pp 123 - 129

Date: 2015-12-12

DOI: http://dx.doi.org/10.1016/j.sse.2015.11.021

Author Information

Name

Institution

Micron Technology Belgium

IMEC

Micron Technology Belgium

IMEC

SOITEC

SOITEC-USA

University of Sao Paulo

IMEC

Micron Technology Belgium

IMEC

Films

Plasma TiN using Unknown

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

SiO2

Keywords

Notes

552



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