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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
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  • Surface cleaning
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Joao Antonio Martino Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Joao Antonio Martino returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1DIBL in enhanced dynamic threshold operation of UTBB SOI with different drain engineering at high temperatures
2Investigation of Bulk and DTMOS triple-gate devices under 60 MeV proton irradiation
3Comparison of the Low-Frequency Noise of Bulk Triple-Gate FinFETs With and Without Dynamic Threshold Operation
4Understanding and optimizing the floating body retention in FDSOI UTBOX
5Dynamic threshold voltage influence on Ge pMOSFET hysteresis
6Extensionless UTBB FDSOI Devices in Enhanced Dynamic Threshold Mode under Low Power Point of View