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Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors
Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries
Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes
Extensionless UTBB FDSOI Devices in Enhanced Dynamic Threshold Mode under Low Power Point of View
Type:
Journal
Info:
J. Low Power Electron. Appl. 2015, 5(2), 69
Date:
2015-04-21
Author Information
| Name | Institution |
|---|---|
| K.R.A. Sasaki | University of Sao Paulo |
| Marc Aoulaiche | IMEC |
| Eddy Simoen | IMEC |
| Cor Claeys | IMEC |
| Joao Antonio Martino | University of Sao Paulo |
Films
Film/Plasma Properties
Substrates
| SiO2 |
Keywords
Notes
| 348 |