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Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition
Ni80Fe20 nanotubes with optimized spintronic functionalities prepared by atomic layer deposition
On the Contact Optimization of ALD-Based MoS2 FETs: Correlation of Processing Conditions and Interface Chemistry with Device Electrical Performance
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Extensionless UTBB FDSOI Devices in Enhanced Dynamic Threshold Mode under Low Power Point of View
Type:
Journal
Info:
J. Low Power Electron. Appl. 2015, 5(2), 69
Date:
2015-04-21
Author Information
| Name | Institution |
|---|---|
| K.R.A. Sasaki | University of Sao Paulo |
| Marc Aoulaiche | IMEC |
| Eddy Simoen | IMEC |
| Cor Claeys | IMEC |
| Joao Antonio Martino | University of Sao Paulo |
Films
Film/Plasma Properties
Substrates
| SiO2 |
Keywords
Notes
| 348 |