Extensionless UTBB FDSOI Devices in Enhanced Dynamic Threshold Mode under Low Power Point of View

Type:
Journal
Info:
J. Low Power Electron. Appl. 2015, 5(2), 69
Date:
2015-04-21
DOI:
http://dx.doi.org/10.3390/jlpea5020069

Author Information

Name Institution
K.R.A. SasakiUniversity of Sao Paulo
Marc AoulaicheIMEC
Eddy SimoenIMEC
Cor ClaeysIMEC
Joao Antonio MartinoUniversity of Sao Paulo

Films

Plasma TiN

Hardware used: Unknown
Deposition Temperature Range N/A

Film/Plasma Properties

Substrates

SiO2

Notes

348