Marc Aoulaiche Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marc Aoulaiche returned 4 record(s).

Number	Title
1	Investigation of Bulk and DTMOS triple-gate devices under 60 MeV proton irradiation
2	Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
3	Understanding and optimizing the floating body retention in FDSOI UTBOX
4	Extensionless UTBB FDSOI Devices in Enhanced Dynamic Threshold Mode under Low Power Point of View