Publication Information

Title:
Investigation of Bulk and DTMOS triple-gate devices under 60 MeV proton irradiation
Type:
Journal
Info:
Microelectronics Reliability 54 (2014) 2349-2354
Date:
2014-06-18

Author Information

Name Institution
Maria Gloria Cano de AndradeUNESP - Univ Estadual Paulista
Joao Antonio MartinoUniversity of Sao Paulo
Marc AoulaicheIMEC
Nadine CollaertIMEC
Eddy SimoenIMEC
Cor ClaeysIMEC

Films

Plasma HfSiOx

Hardware used: Unknown


Plasma SiO2

Hardware used: Unknown


Plasma TiN

Hardware used: Unknown


Film/Plasma Properties

Substrates

Keywords

Notes

215