HfSiOx Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing HfSiOx films returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Annealing behavior of ferroelectric Si-doped HfO2 thin films
2Band alignment of atomic layer deposited SiO2 and HfSiO4 with $(\bar{2}01)$ β-Ga2O3
3Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1-xOy on InGaZnO4
4Ferroelectric phenomena in Si-doped HfO2 thin films with TiN and Ir electrodes
5High-κ insulating materials for AlGaN/GaN metal insulator semiconductor heterojunction field effect transistors
6Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition
7Investigation of Bulk and DTMOS triple-gate devices under 60 MeV proton irradiation
8Optical properties and bandgap evolution of ALD HfSiOx films
9TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films
10The effects of layering in ferroelectric Si-doped HfO2 thin films


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