SiO2 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing SiO2 films returned 143 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Modal properties of a strip-loaded horizontal slot waveguide
2Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors
3Atmospheric-Pressure Plasma-Enhanced Spatial ALD of SiO2 Studied by Gas-Phase Infrared and Optical Emission Spectroscopy
4Metal-Insulator-Metal Single Electron Transistors with Tunnel Barriers Prepared by Atomic Layer Deposition
5Oxygen Recombination Probability Data for Plasma-Assisted Atomic Layer Deposition of SiO2 and TiO2
6Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
7Systematic Study of the SiOx Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiOx/SiO2 Super-Lattice
8Flexible insulator of hollow SiO2 spheres and polyimide hybrid for flexible OLED
9Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
10Spectral analysis of sidewall roughness during resist-core self-aligned double patterning integration
11Influence of Pre and Post-treatments on Plasma Enhanced ALD SiO2 and Al2O3 layers on GaN
12Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlook
13Ga2O3 MOSFETs Using Spin-On-Glass Source/Drain Doping Technology
14Designing high performance precursors for atomic layer deposition of silicon oxide
15Low temperature plasma-enhanced ALD enables cost-effective spacer defined double patterning (SDDP)
16Boosting n-Type Doping Levels of Ge With Co-Doping by Integrating Plasma-Assisted Atomic Layer Deposition and Flash Annealing Process
17Room temperature CO2 detection using interdigitated capacitors with heteropolysiloxane sensing films
18Smart Surface for Elution of Protein-Protein Bound Particles: Nanonewton Dielectrophoretic Forces Using Atomic Layer Deposited Oxides
19Plasma enhanced atomic layer deposition of SiNx:H and SiO2
20Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
21Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD
22Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
23Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features
24Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics
25Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide
26Plasma enhanced atomic layer deposited silicon dioxide with divalent Si precursor [N,N'-tert-butyl-1,1-dimethylethylenediamine silylene]
27Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
28A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD
29Optical properties and bandgap evolution of ALD HfSiOx films
30Interfacial, Electrical, and Band Alignment Characteristics of HfO2/Ge Stacks with In Situ-Formed SiO2 Interlayer by Plasma-Enhanced Atomic Layer Deposition
31Annealing Effects on the Band Alignment of ALD SiO2 on (InxGa1-x)2O3 for x = 0.25-0.74
32Band alignment of atomic layer deposited SiO2 and HfSiO4 with $(\bar{2}01)$ β-Ga2O3
33Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
34Effect of Plasma Power of Plasma Enhanced Atomic Layer Deposition Process for Gate Insulator Deposition in Top-Gate Thin-Film Transistors
35Effect of Reaction Mechanism on Precursor Exposure Time in Atomic Layer Deposition of Silicon Oxide and Silicon Nitride
36Gate Insulator for High Mobility Oxide TFT
37Experimental demonstration of single electron transistors featuring SiO2 plasma-enhanced atomic layer deposition in Ni-SiO2-Ni tunnel junctions
38On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes
39Plasma-enhanced atomic layer deposition of SiO2 for channel isolation of colloidal quantum dots phototransistors
40Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2
41A study on film thickness control of vertical flow showerhead reactor for RF plasma deposition
42Self-catalysis by aminosilanes and strong surface oxidation by O2 plasma in plasma-enhanced atomic layer deposition of high-quality SiO2
43Plasma-enhanced atomic layer deposition of silicon dioxide films using plasma-activated triisopropylsilane as a precursor
44Correlation between SiO2 growth rate and difference in electronegativity of metal-oxide underlayers for plasma enhanced atomic layer deposition using tris(dimethylamino)silane precursor
45Simultaneous scanning tunneling microscopy and synchrotron X-ray measurements in a gas environment
46Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma
47Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes
48Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
49Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition
50Irradiation effects of graphene-enhanced gallium nitride (GaN) metal-semiconductor-metal (MSM) ultraviolet photodetectors
51Internal Photoemission Spectroscopy Measurements of the Energy Barrier Heights between ALD SiO2 and Ta-Based Amorphous Metals
52Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms
53Symmetrical Al2O3-based passivation layers for p- and n-type silicon
54On the role of nanoporosity in controlling the performance of moisture permeation barrier layers
55Effect of plasma and heat treatment on silicon dioxide films by plasma-enhanced atomic layer deposition
56Engineering Interfacial Silicon Dioxide for Improved Metal-Insulator-Semiconductor Silicon Photoanode Water Splitting Performance
57Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition
58Effect of Deposition Method on Valence Band Offsets of SiO2 and Al2O3 on (Al0.14Ga0.86)2O3
59Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor
60Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1-xOy on InGaZnO4
61High-Reflective Coatings For Ground and Space Based Applications
62Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
63Steady-state Thermal Conductivity Measurement of Dielectric Stacks for Phase-Change Memory Power Reduction
64Band alignment of atomic layer deposited SiO2 on (010) (Al0.14Ga0.86)2O3
65Design and development of nanoimprint-enabled structures for molecular motor devices
66Electrical Characteristics of p-Type Bulk Si Fin Field-Effect Transistor Using Solid-Source Doping With 1-nm Phosphosilicate Glass
67Evidence for low-energy ions influencing plasma-assisted atomic layer deposition of SiO2: Impact on the growth per cycle and wet etch rate
68Applications of nanoNewton dielectrophoretic forces using atomic layer deposited oxides for microfluidic sample preparation and proteomics
69Improved film quality of plasma enhanced atomic layer deposition SiO2 using plasma treatment cycle
70Bottom-up plasma-enhanced atomic layer deposition of SiO2 by utilizing growth inhibition using NH3 plasma pre-treatment for seamless gap-fill process
71PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads
72Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride
73Atomic layer deposition of metal-oxide thin films on cellulose fibers
74Plasma Enhanced Atomic Layer Deposition of Al2O3/SiO2 MIM Capacitors
75Non-destructive acoustic metrology and void detection in 3x50μm TSV
76Al2O3/SiO2 nanolaminate for a gate oxide in a GaN-based MOS device
77Plasma Enhanced Atomic Layer Deposition of SiO2 Using Space-Divided Plasma System
78Normally-off AlGaN/GaN-on-Si metal-insulator-semiconductor heterojunction field-effect transistor with nitrogen-incorporated silicon oxide gate insulator
79Surface oxidation model in plasma enhanced atomic layer deposition for silicon oxide films including various aminosilane precursors
80Single-Cell Photonic Nanocavity Probes
81Photoluminescence and electroluminescence from Ge/strained GeSn/Ge quantum wells
82Approaching the limits of dielectric breakdown for SiO2 films deposited by plasma-enhanced atomic layer deposition
83Via sidewall insulation for through cell via contacts
84Investigation of Bulk and DTMOS triple-gate devices under 60 MeV proton irradiation
85Spectroscopic and electrical calculation of band alignment between atomic layer deposited SiO2 and β-Ga2O3 (2̅01)
86Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
87A study on the growth mechanism and gas diffusion barrier property of homogeneously mixed silicon-tin oxide by atomic layer deposition
88Nanometer-Thick Conformal Pore Sealing of Self-Assembled Mesoporous Silica by Plasma-Assisted Atomic Layer Deposition
89Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction
90GaN Nanowire MOSFET With Near-Ideal Subthreshold Slope
91Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
92HfO2/SiO2 anti-reflection films for UV lasers via plasma-enhanced atomic layer deposition
93Interrogation of Electrochemical Properties of Polymer Electrolyte Thin Films with Interdigitated Electrodes
94Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition
95Nanoshape Imprint Lithography for Fabrication of Nanowire Ultracapacitors
96'Zero-charge' SiO2/Al2O3 stacks for the simultaneous passivation of n+ and p+ doped silicon surfaces by atomic layer deposition
97Charge Transport through Organic Molecular Wires Embedded in Ultrathin Insulating Inorganic Layer
98Theoretical Understanding of the Reaction Mechanism of SiO2 Atomic Layer Deposition
99Residual stress study of thin films deposited by atomic layer deposition
100Development of Space Divided PE-ALD System and Process Design for Gap-Fill Process in Advanced Memory Devices
101Programmable on-chip DNA compartments as artificial cells
102Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
103A PEALD Tunnel Dielectric for Three-Dimensional Non-Volatile Charge-Trapping Technology
104Al2O3 Insertion Layer for Improved PEALD SiO2/(Al)GaN Interfaces
105Macro-conformality of coatings deposited using high-speed spatial plasma-enhanced atomic layer deposition
106Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications
107Fabrication of nanoporous membranes for tuning microbial interactions and biochemical reactions
108Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching
109A fully integrated electronic platform for multiplexed intermolecular force spectroscopy
110Multiplexed actuation using ultra dielectrophoresis for proteomics applications: a comprehensive electrical and electrothermal design methodology
111Propagating gene expression fronts in a one-dimensional coupled system of artificial cells
112Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
113Poly-Si gate electrodes for AlGaN/GaN HEMT with high reliability and low gate leakage current
114Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers
115Investigating the interface characteristics of high-k ZrO2/SiO2 stacked gate insulator grown by plasma-enhanced atomic layer deposition for improving the performance of InSnZnO thin film transistors
116An ultra-thin SiO2 ALD layer for void-free bonding of III-V material on silicon
117Impact of degradable nanowires on long-term brain tissue responses
118Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
119Silicon dioxide deposition behavior via ALD using BTBAS with ozone or O2 plasma
120High wet-etch resistance SiO2 films deposited by plasma-enhanced atomic layer deposition with 1,1,1-tris(dimethylamino)disilane
121Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
122Breakdown and Protection of ALD Moisture Barrier Thin Films
123Energy-enhanced atomic layer deposition for more process and precursor versatility
124Spectral analysis of the line-width and line-edge roughness transfer during self-aligned double patterning approach
125Order of Dry and Wet Mixed-Length Self-Assembled Monolayers
126Impact of oxygen plasma on nitrided and annealed atomic layer deposited SiO2/high-k/metal gate for high-voltage input and output fin-shaped field effect transistor devices
127Index matching at the nanoscale: light scattering by core-shell Si/SiOx nanowires
128Plasma-enhanced atomic layer deposition of low temperature silicon dioxide films using di-isopropylaminosilane as a precursor
129Innovative scatterometry approach for self-aligned quadruple patterning (SAQP) process control
130Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
131Chemical reactions during plasma-enhanced atomic layer deposition of SiO2 films employing aminosilane and O2/Ar plasma at 50°C
132Atomic layer deposited silicon dioxide films on nanomechanical silicon nitride resonators
133High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal-Organic Silicon Precursor and Oxygen Radical
134Localized dielectric breakdown and antireflection coating in metal-oxide-semiconductor photoelectrodes
135Graphene-based bimorphs for micron-sized, autonomous origami machines
136Radical Enhanced Atomic Layer Deposition of Metals and Oxides
137Multiscale modeling for SiO2 atomic layer deposition for high-aspect-ratio hole patterns
138Comparative study of ALD SiO2 thin films for optical applications
139Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
1403D structure evolution using metastable atomic layer deposition based on planar silver templates
141Trapped charge densities in Al2O3-based silicon surface passivation layers
142Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2
143Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material