Publication Information

Title:
Modal properties of a strip-loaded horizontal slot waveguide
Type:
Journal
Info:
Journal of the European Optical Society-Rapid Publications (2017) 13:37
Date:
2017-11-13

Author Information

Name Institution
Ségolène PélissetUniversity of Eastern Finland
Janne LaukkanenUniversity of Eastern Finland
Markku KuittinenUniversity of Eastern Finland
Seppo HonkanenUniversity of Eastern Finland
Matthieu RousseyUniversity of Eastern Finland

Films

Plasma SiO2

Hardware used: Beneq TFS-200

CAS#: 0-0-0

CAS#: 7782-44-7

CAS#: 7727-37-9

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Substrates

TiO2

Keywords

Notes

1101