Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
GaN Nanowire MOSFET With Near-Ideal Subthreshold Slope
Type:
Journal
Info:
IEEE ELECTRON DEVICE LETTERS, VOL. 39, NO. 2, PP. 184-187, 2018
Date:
2017-12-21
Author Information
Name | Institution |
---|---|
Wenjun Li | University of Notre Dame |
Matt D. Brubaker | National Institute of Standards and Technology |
Bryan T. Spann | National Institute of Standards and Technology |
Kris A. Bertness | National Institute of Standards and Technology |
Patrick Fay | University of Notre Dame |
Films
Film/Plasma Properties
Characteristic: Thickness
Analysis: -
Substrates
Silicon |
Keywords
Notes
1082 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |