Index matching at the nanoscale: light scattering by core-shell Si/SiOx nanowires

Type:
Journal
Info:
Nanotechnology 27 (2016) 435202
Date:
2016-07-26
DOI:
https://doi.org/10.1088/0957-4484/27/43/435202

Author Information

Name Institution
Christian LeitererLeibniz Institute of Photonic Technology
Gerald BrönstrupHelmholtz-Zentrum Berlin für Materialien und Energie GmbH
Norbert JahrLeibniz Institute of Photonic Technology
Florian TalkenbergLeibniz Institute of Photonic Technology
György Zoltán RadnócziHungarian Academy of Sciences
Béla PéczHungarian Academy of Sciences
Silke ChristiansenHelmholtz-Zentrum Berlin für Materialien und Energie GmbH
Vladimir SivakovLeibniz Institute of Photonic Technology

Films

Plasma SiO2

Hardware used: Oxford Instruments OpAL
3DMASi, (Me2N)3SiH, [(CH3)2N]3SiH, Tris(DiMethylAmido) Silane
CAS#: 15112-89-7
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 120C

Film/Plasma Properties

Substrates

Silicon
Nanowire

Notes

944