Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Florian Talkenberg Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Florian Talkenberg returned 3 record(s).

NumberTitle
1Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
2Index matching at the nanoscale: light scattering by core-shell Si/SiOx nanowires
3Atomic layer deposition precursor step repetition and surface plasma pretreatment influence on semiconductor-insulator-semiconductor heterojunction solar cell