Florian Talkenberg Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Florian Talkenberg returned 3 record(s).

NumberTitle
1Index matching at the nanoscale: light scattering by core-shell Si/SiOx nanowires
2Atomic layer deposition precursor step repetition and surface plasma pretreatment influence on semiconductor-insulator-semiconductor heterojunction solar cell
3Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings