Publication Information

Title:
Internal Photoemission Spectroscopy Measurements of the Energy Barrier Heights between ALD SiO2 and Ta-Based Amorphous Metals
Type:
Conference Proceedings
Info:
ECS Transactions, 85 (13) 729 - 734
Date:
2018-06-01

Author Information

Name Institution
Melanie A. JenkinsOregon State University
Tyler KlarrOregon State University
John M. McGloneOregon State University
John F. WagerOregon State University
John F. Conley, Jr.Oregon State University

Films

Plasma SiO2


Film/Plasma Properties

Characteristic: Barrier Height
Analysis: IPS, Internal Photoemission Spectroscopy

Substrates

TaN

Keywords

Notes

1424