
Internal Photoemission Spectroscopy Measurements of the Energy Barrier Heights between ALD SiO2 and Ta-Based Amorphous Metals
Type:
Conference Proceedings
Info:
ECS Transactions, 85 (13) 729 - 734
Date:
2018-06-01
Author Information
Name | Institution |
---|---|
Melanie A. Jenkins | Oregon State University |
Tyler Klarr | Oregon State University |
John M. McGlone | Oregon State University |
John F. Wager | Oregon State University |
John F. Conley, Jr. | Oregon State University |
Films
Plasma SiO2
Film/Plasma Properties
Characteristic: Barrier Height
Analysis: IPS, Internal Photoemission Spectroscopy
Substrates
TaN |
Notes
1424 |