John F. Conley, Jr. Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by John F. Conley, Jr. returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma Enhanced Atomic Layer Deposition of Al2O3/SiO2 MIM Capacitors
2Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor
3Internal Photoemission Spectroscopy Measurements of the Energy Barrier Heights between ALD SiO2 and Ta-Based Amorphous Metals
4Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes