Search 1628 plasma ALD publications by:
BDEAS, SAM-24, Bis(diethylamino)silane, (Et2N)2SiH2, CAS# 27804-64-4
Where to buy
|1||Strem Chemicals, Inc.||Bis(diethylamino)silane, 99% (99.999%-Si) BDEAS PURATREM|
|3||Strem Chemicals, Inc.||Bis(diethylamino)silane, 97% BDEAS|
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 41 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.