BDEAS, SAM-24, Bis(diethylamino)silane, (Et2N)2SiH2, CAS# 27804-64-4

Where to buy

NumberVendorRegionLink
1Strem Chemicals, Inc.🇺🇸Bis(diethylamino)silane, 99% (99.999%-Si) BDEAS PURATREM
2Ereztech🇺🇸Bis(diethylamino)silane
3Yoodatech (Shanghai) Co., LtdBDEAS, SAM-24, Bis(diethylamino)silane, (Et2N)2SiH2 - contact maggie@yoodatech.com
4Strem Chemicals, Inc.🇺🇸Bis(diethylamino)silane, 97% BDEAS
5Pegasus Chemicals🇬🇧Bis(diethylamino)silane
6DOCK/CHEMICALS🇩🇪Bis(diethylamino)silane

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 45 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Evidence for low-energy ions influencing plasma-assisted atomic layer deposition of SiO2: Impact on the growth per cycle and wet etch rate
2Improved film quality of plasma enhanced atomic layer deposition SiO2 using plasma treatment cycle
3Pyroelectric and Ferroelectric Properties of Hafnium Oxide Doped with Si via Plasma Enhanced ALD
4Comparative study of ALD SiO2 thin films for optical applications
5Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor
6Experimental demonstration of single electron transistors featuring SiO2 plasma-enhanced atomic layer deposition in Ni-SiO2-Ni tunnel junctions
7Theoretical Understanding of the Reaction Mechanism of SiO2 Atomic Layer Deposition
8Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma
9On the role of nanoporosity in controlling the performance of moisture permeation barrier layers
10Plasma Enhanced Atomic Layer Deposition of Al2O3/SiO2 MIM Capacitors
11Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
12Single-electron transistors featuring silicon nitride tunnel barriers prepared by atomic layer deposition
13Internal Photoemission Spectroscopy Measurements of the Energy Barrier Heights between ALD SiO2 and Ta-Based Amorphous Metals
14Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
15Spectral analysis of the line-width and line-edge roughness transfer during self-aligned double patterning approach
16A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD
17Breakdown and Protection of ALD Moisture Barrier Thin Films
18Metal-Insulator-Metal Single Electron Transistors with Tunnel Barriers Prepared by Atomic Layer Deposition
19High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal-Organic Silicon Precursor and Oxygen Radical
20Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
21Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2
22Spectral analysis of sidewall roughness during resist-core self-aligned double patterning integration
23Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
24'Zero-charge' SiO2/Al2O3 stacks for the simultaneous passivation of n+ and p+ doped silicon surfaces by atomic layer deposition
25Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
26Plasma Enhanced Atomic Layer Deposition of SiO2 Using Space-Divided Plasma System
27Simultaneous scanning tunneling microscopy and synchrotron X-ray measurements in a gas environment
28Designing high performance precursors for atomic layer deposition of silicon oxide
29Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
30Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
31Atmospheric-Pressure Plasma-Enhanced Spatial ALD of SiO2 Studied by Gas-Phase Infrared and Optical Emission Spectroscopy
32Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
33Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
34Oxygen Recombination Probability Data for Plasma-Assisted Atomic Layer Deposition of SiO2 and TiO2
35PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads
36Fabrication of nanoporous membranes for tuning microbial interactions and biochemical reactions
37Plasma Enhanced Atomic Layer Deposition of SiO2 Using Space-Divided Plasma System
38Multiscale modeling for SiO2 atomic layer deposition for high-aspect-ratio hole patterns
39Synthesis and characterization of titanium silicon oxide thin films prepared by plasma enhanced atomic layer deposition
40Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers
41Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor
42Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2
43Metal-Insulator-Metal Single Electron Transistors with Tunnel Barriers Prepared by Atomic Layer Deposition
44Surface reactions of aminosilane precursors during N2 plasma-assisted atomic layer deposition of SiNx
45Energy-enhanced atomic layer deposition for more process and precursor versatility