Metal-Insulator-Metal Single Electron Transistors with Tunnel Barriers Prepared by Atomic Layer Deposition
Type:
Journal
Info:
Appl. Sci. 2017, 7, 246
Date:
2017-02-27
Author Information
| Name | Institution |
|---|---|
| Golnaz Karbasian | University of Notre Dame |
| Michael S. McConnell | University of Notre Dame |
| Hubert George | University of Notre Dame |
| Louisa C. Schneider | University of Notre Dame |
| Matthew J. Filmer | University of Notre Dame |
| Alexei P. Orlov | University of Notre Dame |
| Alexei N. Nazarov | V.E. Lashkaryov Institute of Semiconductor Physics |
| Gregory L. Snider | University of Notre Dame |
Films
Plasma SiO2
Plasma SiO2
Plasma SiNx
Film/Plasma Properties
Substrates
| Pt |
| Ni |
Notes
| 1100 |